| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 41.38 | conditioner modified | YIELD::TDYER | | Fri May 09 1997 15:35 | 12 |
|
MODIFIED CONDITIONER PLUMBING:
1/4" N2 line replaced with 3/8" tubing from valve to conditioner. 1/2"
water line ran from valve to conditioner. Also both air actuated valves
are stowed in the cabinet and the door can shut. Currently the digital
output for "slurry-3" actuates the N2 valve for the conditioner. If Pro
Eng requires DI durring conditioning, simply connect the "T" from the
N2 valve to the DI valve. All tubing and valves are clearly labeled.
Tim
|
| 41.39 | check valves | SUBPAC::CMP | | Tue May 13 1997 19:28 | 4 |
| There are 3 check valves installed on the DI water line to the 3 way
valve that also controls metals slurry. The reason this is there is to
keep the slurry from backing into the DI water system. This is due to a
leaky valve.
|
| 41.40 | safety upgrade | SUBPAC::CMP | | Tue May 13 1997 19:31 | 3 |
| Today we installed a MHTA saety stop assy. This device keeps the
multi-head locked preventing an movement. To use the device, insert
under the multi-head lock lever when in the up position.
|
| 41.41 | TIM'S HIT LIST COMPLETE. | FABSIX::B_WESTPHAL | Bradley BP#661 EXT# 6610 | Sat May 17 1997 19:50 | 5 |
|
CMP.D1 - Pads (both) were replaced and process area cleaned up. Service covers
were installed.
|
| 41.42 | todays activities | FABSIX::R_GEE | | Mon May 19 1997 19:09 | 10 |
| - Replaced the pad and carriers.
- Adjusted the wafer lose sensors.
- Replaced the air line for the solenoid that actuates the
scrubber brush DI water.
- Adjusted the conditioner service position.
A shift & Tim D.
|
| 41.43 | Wafer lose sencor brackets modified\ | FABSIX::R_GEE | | Tue May 20 1997 19:13 | 8 |
| We've had problems keeping the wafer lose detection sensors
adjusted properly. Modified all five sensor brackets so the
sensors are within 5" from the table, previously the distance
was around 8".
A shift
|
| 41.44 | Memorial Day Shutdown Checksheet | ASDG::POIRIER | | Fri May 23 1997 17:18 | 51 |
|
CMP.D SHUT DOWN CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) SCRUB SIDES OF CARRIERS JP / 5-23
2) RUN CARRIER BLOW OFF FOR 30 SECONDS JP / 5-23
3) REMOVE ALL CARRIERS JP / 5-23 *
4) PLACE WIPES UNDER CARRIER FILMS AND LAY CARRIERS DI TANK JP / 5-23
5) IF POWER TO SLURRY SYSTEM IS GOING TO BE LOST, CONTACT *
ASHLAND CHEMICAL AND HAVE SLURRY SYSTEM PURGED AND CHARGED
WITH DI WATER.
6) CLEAN ENTIRE SYSTEM OF DRIED SLURRY JP-MS / 5-23
7) CYCLE/RINSE ALL DI FUNCTIONS: SPRAY NOZZLES, SLURRY PUMPS,
CONDITIONER RINSE, ELEVATOR TANKS. JP-MS / 5-23
8) SHUT OFF DI BEHIND SYSTEM (ROTATE 3W VLV TO FULL RETURN) JP / 5-23
9) DRAIN ELEVATOR AND CONDITIONER TUBE JP-MS / 5-23
10) REMOVE PADS, AND CLEAN AND DRY TABLES JP-MS / 5-23
11) REMOVE SCRUBBER BRUSHES AND SOAK IN DI JP-MS / 5-23 *
12) DRY ENTIRE SYSTEM OF ANY STANDING WATER JP-MS / 5-23
COMMENTS:
Item #3: The spindles lifted the carriers up during carrier unload
on all 5 spindles. After a few seconds, all 5 carriers
dropped to the table. Two carrier films were damaged.
The remaining 3 carriers are in the sink.
Item #5: System slurry is on day tanks.
Item #11: Scrubber brushes look dirty, should be replaced at start-up.
Misc: The conditioner hard stop was bumped during cleaning. It
was rebonded to the tub with RTV.
Misc: The water track in unload elevator "A" was full of silicon
particles.
CMP.D START UP CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) TURN ON DI WATER (ROTATE 3W VLV TO FULLY TO POLISHER. ______/______
2) CYCLE/RUN ALL DI FUNCTIONS FOR 15 MINUTES ______/______
3) WIPE DOWN SYSTEM CLEAN ALL DRIED SLURRY ______/______
4) INSTALL SCRUBBER BRUSHES ______/______
5) INSTALL CARRIERS ______/______
6) RUN WET IDLE PROGRAM FOR 15 MIN. (ENOUGH TO CLEAN CARRIERS) ______/______
7) PUT IN WET IDLE AND TURN OVER TO MFG FOR MQC ______/______
|
| 41.45 | D1 startup | FABSIX::B_FINN | | Tue May 27 1997 18:34 | 13 |
|
CMP.D START UP CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) TURN ON DI WATER (ROTATE 3W VLV TO FULLY TO POLISHER. BF,TL/ 5/27/97
2) CYCLE/RUN ALL DI FUNCTIONS FOR 15 MINUTES BF,Tl/ 5/27/97
3) WIPE DOWN SYSTEM CLEAN ALL DRIED SLURRY BF,Tl/ 5/27/97
4) INSTALL SCRUBBER BRUSHES BF/Tl/ 5/27/97
5) INSTALL CARRIERS BG/TL/ 5/27/97
6) RUN WET IDLE PROGRAM FOR 15 MIN. (ENOUGH TO CLEAN CARRIERS) BG/TL/ 5/27/97
7) PUT IN WET IDLE AND TURN OVER TO MFG FOR MQC BG/ 5/27/97
|
| 41.46 | Scrubber Brushes Changed | SUBPAC::DAWSON | | Thu May 29 1997 16:29 | 5 |
|
Particle checks were performed on CMP.D1. Scrub brush imprints, 3
different circles were noticed. Brushes were chaged out.
WCMP
|
| 41.47 | Head #3 downforce checked / wafer detect #1 | FABSIX::R_GEE | | Mon Jun 02 1997 18:57 | 9 |
| * Checked head #3 downforce per. EE.
Point to point setpoint 377 lbs, actual 354 lbs. All set.
* After around 30 wafers we needed to calibrate wafewr lose sensor
#1.
A shift
|
| 41.48 | Sensor replaced/Robot adjusted | FABSIX::B_WESTPHAL | Bradley BP#661 EXT# 6610 | Thu Jun 05 1997 19:38 | 6 |
|
CMP.D1 - Down for wafer handling problems in the load station. The robot
pick and place positions to cassette A and prealigner were
recalibrated. The same was tested with no problems. The Wafer loss
sensor (#5) was replaced, adjusted and tested as requested by EE.
|