| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 55.2 | WW9 WEEKLY PM CHECKSHEET | ASDG::POIRIER | | Sat Aug 31 1996 16:44 | 31 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 8/31/96 SYSTEM RTC CODE: CMP-SCRUB.C1-7 TECH NAME: J.P.
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:___49_____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:___40_____
6.1.3 Check the Drip Pan for contamination Completed:____X______
6.1.4 Check all tubing/fittings for leaks Completed:____X______
6.1.5 Check all wafer transport belts Completed:____X______
6.1.6 Clean the Send module and Scrub modules Completed:____X______
6.1.7 Check scrub brushes for contamination Completed:____X______
6.1.8 Check scrub brush height in both modules Completed:____X______
Comments:__________________________________________________________________
BRUSH HEIGHTS: OUTSIDE BRUSH STATION
FRONT = .336" REAR = .407"
INSIDE BRUSH STATION
FRONT = .334" REAR = .365"
|
| 55.3 | CMP-SCRUB.C1-7 SHUTDOWN CHECKSHEET | FABSIX::R_POIRIER | | Mon Sep 02 1996 01:57 | 20 |
|
CMP-SCRUB.A1/.A1/.A3/.C1-7 SHUTDOWN CHECKSHEET
----------------------------------------------
Tech. Date
------- -------
1. Close main incoming DI Water valve to each
system and open the DI Water return valve
(UDR). This will allow all incoming DI Water
to flow to UDR. ___B___ _9/1/96_
2. Remove all PVA scrub brushes and submerge
in DI water. Label each brush with the
tool name. ___B___ _9/1/96_
3. Perform a complete wipe down and dry of
all wet surfaces. ___B___ _9/1/96_
4. Power down each system. ___B___ _9/1/96_
5. Enter checksheet into notesfile. ___B___ _9/1/96_
|
| 55.4 | startup | FABSIX::B_FINN | | Tue Sep 03 1996 19:19 | 24 |
|
CMP-SCRUB.C1-7 STARTUP CHECKSHEET
--------------------------------
DATE 9/3/96 TECH. NAME: A shift
1. Ensure that all necessary facilities are
available and ready to use. ___X___
2. Power up system. ___X___
3. Re-install PVA scrub brushes. ___X____
4. Open incoming DI Water Valve(s)
system. ___X___
5. Close UDR valve at system. ___X___
6. Change RTC status to VERIFY and notify
Operations that the systems are ready
for MQC. ___X___
|
| 55.5 | WEEKLY PM COMPLETED | FABSIX::B_FINN | | Tue Sep 03 1996 19:33 | 30 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9/3/96 SYSTEM RTC CODE: CMP-SCRUB.C1-7 TECH NAME: A SHIFT
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:___49_____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:___40_____
6.1.3 Check the Drip Pan for contamination Completed:____X______
6.1.4 Check all tubing/fittings for leaks Completed:____X______
6.1.5 Check all wafer transport belts Completed:____X______
6.1.6 Clean the Send module and Scrub modules Completed:____X______
6.1.7 Check scrub brushes for contamination Completed:____X______
6.1.8 Check scrub brush height in both modules Completed:____X______
Comments:__________________________________________________________________
BRUSH HEIGHTS: OUTSIDE BRUSH STATION
FRONT = 341 REAR = 407
INSIDE BRUSH STATION
FRONT = 334 REAR = 365
|
| 55.6 | WW 11 weekly p.m. | FABSIX::R_GEE | | Wed Sep 11 1996 05:16 | 30 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9/11/96 SYSTEM RTC CODE: CMP-SCRUB.C1-7 TECH NAME: A SHIFT
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:___50_____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:___40_____
6.1.3 Check the Drip Pan for contamination Completed:____X______
6.1.4 Check all tubing/fittings for leaks Completed:____X______
6.1.5 Check all wafer transport belts Completed:____X______
6.1.6 Clean the Send module and Scrub modules Completed:____X______
6.1.7 Check scrub brushes for contamination Completed:____X______
6.1.8 Check scrub brush height in both modules Completed:____X______
Comments:__________________________________________________________________
BRUSH HEIGHTS: OUTSIDE BRUSH STATION
FRONT = 435 REAR = 345
INSIDE BRUSH STATION
FRONT = 350 REAR = 375
|
| 55.7 | ww12 weekly pm | FABSIX::L_SHKOLNIKOV | | Wed Sep 18 1996 04:59 | 29 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9/18/96 SYSTEM RTC CODE: CMP-SCRUB.C1-7 TECH NAME: D SHIFT
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:__50__
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:__42__
6.1.3 Check the Drip Pan for contamination Completed:___X___
6.1.4 Check all tubing/fittings for leaks Completed:___X___
6.1.5 Check all wafer transport belts Completed:___X___
6.1.6 Clean the Send module and Scrub modules Completed:___X___
6.1.7 Check scrub brushes for contamination Completed:___X___
6.1.8 Check scrub brush height in both modules Completed:___X___
Comments: The brush heights has been changed since last week.
The new numbers are listed below.
BRUSH HEIGHTS: O I
R 345 375
F 443 375
|
| 55.8 | WW XIII - Weekly | SUBPAC::LANDRY | | Mon Sep 23 1996 17:17 | 27 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9/23/96 SYSTEM RTC CODE: CMP-SCRUB.C1-7 TECH NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 41
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
Brush Heights: OB = Front 443 IB = Front 375
Rear 345 Rear 375
|
| 55.9 | ww14 weekly pm | FABSIX::L_SHKOLNIKOV | | Fri Oct 04 1996 05:01 | 28 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/04/96 SYSTEM RTC CODE: CMP-SCRUB.C1-7 TECH NAME: D shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 42
6.1.3 Check the Drip Pan for contamination Completed: X **
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
Brush Heights: OB IB
Rear 345 375
Front 445 375
** A lot of wafer pieces was found in and around spin station.
|
| 55.10 | Weekly Pm WW#15 complete | FABSIX::O_WHITFORD | | Thu Oct 10 1996 04:23 | 28 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/10/96 SYSTEM RTC CODE: CMP-SCRUB.C1-7 TECH. NAME: D. Whitford
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 PSI
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 42 PSI
6.1.3 Check the Drip Pan for contamination Completed: DW
6.1.4 Check all tubing/fittings for leaks Completed: DW
6.1.5 Check all wafer transport belts Completed: DW
6.1.6 Clean the Send module and Scrub modules Completed: DW
6.1.7 Check scrub brushes for contamination Completed: DW
6.1.8 Check scrub brush height in both modules Completed: DW
Comments:
Brush heights: Front Rear
Outer brush station .445 .345
Inner brush station .375 .375
|
| 55.11 | ww16 weekly pm. | FABSIX::L_SHKOLNIKOV | | Tue Oct 15 1996 22:53 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/15/96 SYSTEM RTC CODE: CMP-SCRUB.C1-7 TECH NAME: D shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 42
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
Brush Heights: OB IB
Rear 345 375
Front 445 375
|
| 55.12 | ww17 weekly pm. | FABSIX::L_SHKOLNIKOV | | Wed Oct 23 1996 23:16 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/23/96 SYSTEM RTC CODE: CMP-SCRUB.C1-7 TECH NAME: D shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
Brush Heights: OB IB
Rear 345 375
Front 445 375
|
| 55.13 | WW XVIII - Weekly Completed | SUBPAC::LANDRY | | Sun Oct 27 1996 14:29 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/27/96 SYSTEM RTC CODE: CMP-SCRUB.C1-7 TECH NAME: Landry
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 39
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
Brush Heights: OB IB
Rear 345 375
Front 445 375
|
| 55.14 | WW 19 - Weekly completed | SUBPAC::LANDRY | | Wed Nov 06 1996 19:13 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/06/96 SYSTEM RTC CODE: CMP-SCRUB.C1-7 TECH NAME: Gee/Landry
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 29 / 28
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
Brush Heights: OB IB
Rear 345 375
Front 445 375
|
| 55.15 | WEEKLY PM COMPLETED FOR WW20 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Tue Nov 12 1996 21:00 | 27 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/12/96 SYSTEM RTC CODE: CMP-SCRUB.C1-7 TECH NAME: Jubinville
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BJ
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 30/30 BJ
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: BJ
Comments:
Brush Heights: OB IB
Rear 345 375
Front 445 375
|
| 55.16 | WEEKLY PM FOR WW21 COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Nov 20 1996 23:06 | 27 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/20/96 SYSTEM RTC CODE: CMP-SCRUB.C1-7 TECH NAME: Shkolnikov
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 LS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40/40 LS
6.1.3 Check the Drip Pan for contamination Completed: LS *
6.1.4 Check all tubing/fittings for leaks Completed: LS
6.1.5 Check all wafer transport belts Completed: LS
6.1.6 Clean the Send module and Scrub modules Completed: LS
6.1.7 Check scrub brushes for contamination Completed: LS
6.1.8 Check scrub brush height in both modules Completed: LS
Comments: * Found small puddle of water in drip pan under solenoid valves.
Brush Heights: OB IB
Rear 345 375
Front 445 375
|
| 55.17 | ww22 weekly PM. | FABSIX::L_SHKOLNIKOV | | Wed Nov 27 1996 04:32 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/27/96 SYSTEM RTC CODE: CMP-SCRUB.C1-7 TECH NAME: Leon
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 LS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40/40 LS
6.1.3 Check the Drip Pan for contamination Completed: LS
6.1.4 Check all tubing/fittings for leaks Completed: LS
6.1.5 Check all wafer transport belts Completed: LS
6.1.6 Clean the Send module and Scrub modules Completed: LS
6.1.7 Check scrub brushes for contamination Completed: LS
6.1.8 Check scrub brush height in both modules Completed: LS
Comments:
Brush Heights: OB IB
Rear 345 375
Front 445 375
|
| 55.18 | ww23 weekly PM. | FABSIX::L_SHKOLNIKOV | | Thu Dec 05 1996 00:13 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/05/96 SYSTEM RTC CODE: CMP-SCRUB.C1-7 TECH NAME: Leon
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 LS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40/40 LS
6.1.3 Check the Drip Pan for contamination Completed: LS
6.1.4 Check all tubing/fittings for leaks Completed: LS
6.1.5 Check all wafer transport belts Completed: LS
6.1.6 Clean the Send module and Scrub modules Completed: LS
6.1.7 Check scrub brushes for contamination Completed: LS
6.1.8 Check scrub brush height in both modules Completed: LS
Comments:
Brush Heights: OB IB
Rear 345 375
Front 445 375
|
| 55.19 | ww24 weekly p.m. completed | FABSIX::R_GEE | | Sun Dec 08 1996 13:40 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/08/96 SYSTEM RTC CODE: CMP-SCRUB.C1-7 TECH NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40/40
6.1.3 Check the Drip Pan for contamination Completed: TL
6.1.4 Check all tubing/fittings for leaks Completed: TL
6.1.5 Check all wafer transport belts Completed: BG
6.1.6 Clean the Send module and Scrub modules Completed: BG
6.1.7 Check scrub brushes for contamination Completed: BG
6.1.8 Check scrub brush height in both modules Completed: TL
Comments:
Brush Heights: OB IB
Rear 345 375
Front 445 375
|
| 55.20 | cmp-scrub.c7 weekly PM | FABSIX::O_WHITFORD | Quticherwhinin' | Wed Dec 18 1996 22:20 | 33 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
<WW25>
DATE: 12/18/96 SYSTEM RTC CODE:CMP-SCRUB.C7 TECH. NAME: Dave Whitford
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 Whitford
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40 Whitford
6.1.3 Check the Drip Pan for contamination Completed: Whitford
6.1.4 Check all tubing/fittings for leaks Completed: Whitford
6.1.5 Check all wafer transport belts Completed: Whitford
6.1.6 Clean the Send module and Scrub modules Completed: Whitford
6.1.7 Check scrub brushes for contamination Completed: Whitford
6.1.8 Check scrub brush height in both modules Completed: Whitford
Comments: Outer brush station outer mic = .345
inner mic = .445
Inner brush station outer mic = .375
inner mic = .375
PM complete
|
| 55.21 | ww 26 quarterly p.m. completed | FABSIX::R_GEE | | Sun Dec 22 1996 16:40 | 37 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Quarterly Preventative Maintenance Check Sheet, Rev D
DATE:12/22/96 SYSTEM RTC CODE: CMP-SCRUB.C1-7 TECH/SHIFT: LANDRY / GEE
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 42
6.1.3 Check the Drip Pan for contamination Completed: __X__
6.1.4 Check all tubing/fittings for leaks Completed: __X__
6.1.5 Check all wafer transport belts Completed: __X__
6.1.6 Clean the Send module and Scrub modules Completed: __X__
6.1.7 Check scrub brushes for contamination Completed: __X__
6.1.8 Check scrub brush height in both modules Completed: __X__
6.3.1 Check muffin fans for functionality Completed: __X__
6.3.2 Check motor drive belts for defects Completed: __X__
6.3.3 Check the robot knife for loose hardware Completed: __X__
6.3.4 Check the spin station grippers Completed: __X__
6.3.5 Check the motor speed output readings Completed: __X__
Comments: Brush heights O I
R 345 375
F 445 375
|
| 55.22 | cmp-scrub.c1-7 shutdown checksheet completed | FABSIX::R_GEE | | Tue Dec 31 1996 16:03 | 23 |
|
CMP-SCRUB.A1/.A2/.A3/.C1-7 SHUTDOWN CHECKSHEET Tech: Tim Landry
---------------------------------------------- Bob Gee
Tech. Date
------- -------
1. Close main incoming DI Water valve(s) to each Bob Gee 12/31/96
system and open the DI Water return valve
(UDR). This will allow all incoming DI Water
to flow to UDR.
2. Remove all PVA scrub brushes and submerge Tim Landry 12/31/96
in a mixture of DI water and H2O2. Label
each brush with the tool name and brush box
location.
3. Perform a complete wipe down and dry of
all wet surfaces. Bob Gee 12/31/96
4. Power down each system. Bob Gee 12/31/96
5. Enter checksheet into notesfile. Tim Landry 12/31/96
|
| 55.23 | WEEKLY PM COMPLETED FOR WW27 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jan 02 1997 22:01 | 30 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/2/97 SYSTEM RTC CODE: CMP-SCRUB.C1-7 TECH: Leon Shkolnikov (LS)
Brian Jubinville (BJ)
Brad Westphal (BW)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50/LS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 42/BW
6.1.3 Check the Drip Pan for contamination Completed: LS
6.1.4 Check all tubing/fittings for leaks Completed: LS
6.1.5 Check all wafer transport belts Completed: LS
6.1.6 Clean the Send module and Scrub modules Completed: LS
6.1.7 Check scrub brushes for contamination Completed: BW
6.1.8 Check scrub brush height in both modules Completed: BW
OB IB
---- ----
Brush Heights: Front 445 375
Rear 345 375
Comments:
|
| 55.24 | WEEKLY PM COMPLETED FOR WW28 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Jan 08 1997 05:43 | 29 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/8/97 SYSTEM RTC CODE: CMP-SCRUB.C1-7 TECH: Leon Shkolnikov (LS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50/LS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 30/LS
6.1.3 Check the Drip Pan for contamination Completed: LS
6.1.4 Check all tubing/fittings for leaks Completed: LS
6.1.5 Check all wafer transport belts Completed: LS
6.1.6 Clean the Send module and Scrub modules Completed: LS
6.1.7 Check scrub brushes for contamination Completed: LS
6.1.8 Check scrub brush height in both modules Completed: LS
OB IB
---- ----
Brush Heights: Front 445 375
Rear 345 375
Comments: 6.1.2 - Engineer notified
|
| 55.25 | ww29 weekly pm completed. | FABSIX::L_SHKOLNIKOV | | Fri Jan 17 1997 00:41 | 29 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/17/97 SYSTEM RTC CODE: CMP-SCRUB.C1-7 TECH: Leon Shkolnikov (LS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50/LS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 30/LS
6.1.3 Check the Drip Pan for contamination Completed: LS
6.1.4 Check all tubing/fittings for leaks Completed: LS
6.1.5 Check all wafer transport belts Completed: LS
6.1.6 Clean the Send module and Scrub modules Completed: LS
6.1.7 Check scrub brushes for contamination Completed: LS
6.1.8 Check scrub brush height in both modules Completed: LS
OB IB
---- ----
Brush Heights: Front 445 375
Rear 345 375
Comments: 6.1.2 - Engineer notified
|
| 55.26 | WW30 weekly PM completed | FABSIX::B_WESTPHAL | | Fri Jan 24 1997 16:26 | 33 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 24 JAN 97 SYSTEM RTC CODE: SCRUB-CMP.C1-7 TECH. NAME: Bradley J. Westphal
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_49 BW____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_30_BW *__
6.1.3 Check the Drip Pan for contamination Completed:_BW________
6.1.4 Check all tubing/fittings for leaks Completed:_BW________
6.1.5 Check all wafer transport belts Completed:_BW________
6.1.6 Clean the Send module and Scrub modules Completed:_BW________
6.1.7 Check scrub brushes for contamination Completed:_BW________
6.1.8 Check scrub brush height in both modules Completed:_BW________
Front Back
IBS 375 375
OBS 470 370
Comments: * Found that the pressure was at only 30 PSI and that is all that
the room is being supplied with. Informed the Engineer.
|
| 55.27 | WEEKLY PM FOR WW31 COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Jan 29 1997 21:09 | 30 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/29/97 SYSTEM RTC CODE: CMP-SCRUB.C1 TECH: Brian Jubinville (BJ)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50/BJ
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 30/BJ
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: BJ
OB IB
---- ----
Brush Heights: Front 445 375
Rear 345 375
Comments: 6.1.2 - Engineer notified
|
| 55.1 | CMP-SCRUB.C1 EE/PE PASSDOWNS | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Jan 29 1997 21:12 | 5 |
|
THIS NOTE IS DESIGNATED FOR THE EQUIPMENT AND PROCESS
ENGINEERING PASSDOWNS FOR:
CMP-SCRUB.C1
|
| 55.28 | WW32 WEEKLY PM COMPLETED. | FABSIX::L_SHKOLNIKOV | | Wed Feb 05 1997 06:02 | 30 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:02/05/97 SYSTEM RTC CODE: CMP-SCRUB.C1 TECH: Leon shkolnikov (LS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50/BJ
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 30/BJ
6.1.3 Check the Drip Pan for contamination Completed: LS
6.1.4 Check all tubing/fittings for leaks Completed: LS
6.1.5 Check all wafer transport belts Completed: LS
6.1.6 Clean the Send module and Scrub modules Completed: LS
6.1.7 Check scrub brushes for contamination Completed: LS
6.1.8 Check scrub brush height in both modules Completed: LS
OB IB
---- ----
Brush Heights: Front 345 375
Rear 445 375
Comments: 6.1.2 - Engineer notified
|
| 55.29 | WW33 weekly pm. | FABSIX::L_SHKOLNIKOV | | Thu Feb 13 1997 06:06 | 33 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:02/13/97 SYSTEM RTC CODE: CMP-SCRUB.C1 TECH: Leon shkolnikov (LS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 30
6.1.3 Check the Drip Pan for contamination Completed: LS
6.1.4 Check all tubing/fittings for leaks Completed: ** LS
6.1.5 Check all wafer transport belts Completed: LS
6.1.6 Clean the Send module and Scrub modules Completed: LS
6.1.7 Check scrub brushes for contamination Completed: LS
6.1.8 Check scrub brush height in both modules Completed: LS
OB IB
---- ----
Brush Heights: Front 345 375
Rear 445 375
Comments: * 6.1.2 - Engineer notified
**
6.1.4 - Outside brush station - Water coming out through
the motor shafts (front and rear). Will try to get
it fixed ASAP.
|
| 55.30 | ww34 weekly pm. | FABSIX::L_SHKOLNIKOV | | Wed Feb 19 1997 22:22 | 30 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:02/19/97 SYSTEM RTC CODE: CMP-SCRUB.C1 TECH: Leon shkolnikov (LS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40
6.1.3 Check the Drip Pan for contamination Completed: LS
6.1.4 Check all tubing/fittings for leaks Completed: LS
6.1.5 Check all wafer transport belts Completed: LS
6.1.6 Clean the Send module and Scrub modules Completed: LS
6.1.7 Check scrub brushes for contamination Completed: LS
6.1.8 Check scrub brush height in both modules Completed: LS
OB IB
---- ----
Brush Heights: Front 345 375
Rear 445 375
Comments: Outside brush station, rear roller shaft has been replaced last
week, no leaks so far.
|
| 55.31 | ww35 weekly pm. | FABSIX::L_SHKOLNIKOV | | Thu Feb 27 1997 05:06 | 31 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:02/27/97 SYSTEM RTC CODE: CMP-SCRUB.C1 TECH: Leon shkolnikov (LS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 30
6.1.3 Check the Drip Pan for contamination Completed: LS
6.1.4 Check all tubing/fittings for leaks Completed: LS
6.1.5 Check all wafer transport belts Completed: LS
6.1.6 Clean the Send module and Scrub modules Completed: LS
6.1.7 Check scrub brushes for contamination Completed: LS
6.1.8 Check scrub brush height in both modules Completed: LS
OB IB
---- ----
Brush Heights: Front 345 375
Rear 445 375
Comments: EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
|
| 55.32 | ww36 weekly pm completed. | FABSIX::L_SHKOLNIKOV | No more experiments with freedom | Tue Mar 04 1997 23:16 | 29 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:03/04/97 SYSTEM RTC CODE: CMP-SCRUB.C1 TECH: Leon shkolnikov (LS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40
6.1.3 Check the Drip Pan for contamination Completed: LS
6.1.4 Check all tubing/fittings for leaks Completed: LS
6.1.5 Check all wafer transport belts Completed: LS
6.1.6 Clean the Send module and Scrub modules Completed: LS
6.1.7 Check scrub brushes for contamination Completed: LS
6.1.8 Check scrub brush height in both modules Completed: LS
OB IB
---- ----
Brush Heights: Front 345 375
Rear 445 375
Comments:
|
| 55.33 | ww37 weekly pm | FABSIX::L_SHKOLNIKOV | | Thu Mar 13 1997 22:54 | 29 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:03/13/97 SYSTEM RTC CODE:CMP-SCRUB.C1 TECH: Leon shkolnikov (LS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40
6.1.3 Check the Drip Pan for contamination Completed: LS
6.1.4 Check all tubing/fittings for leaks Completed: LS
6.1.5 Check all wafer transport belts Completed: LS
6.1.6 Clean the Send module and Scrub modules Completed: LS
6.1.7 Check scrub brushes for contamination Completed: LS
6.1.8 Check scrub brush height in both modules Completed: LS
OB IB
---- ----
Brush Heights: Front 345 375
Rear 445 375
Comments:
|
| 55.34 | ww38 weekly pm. | FABSIX::L_SHKOLNIKOV | | Tue Mar 18 1997 21:34 | 29 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:03/18/97 SYSTEM RTC CODE:CMP-SCRUB.C1 TECH: Leon shkolnikov (LS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40
6.1.3 Check the Drip Pan for contamination Completed: LS
6.1.4 Check all tubing/fittings for leaks Completed: LS
6.1.5 Check all wafer transport belts Completed: LS
6.1.6 Clean the Send module and Scrub modules Completed: LS
6.1.7 Check scrub brushes for contamination Completed: LS
6.1.8 Check scrub brush height in both modules Completed: LS
OB IB
---- ----
Brush Heights: Front 345 375
Rear 445 375
Comments:
|
| 55.35 | SEMI-ANNUAL PM COMPLETED FOR WW39 | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Mar 27 1997 06:55 | 96 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Semi-Annual Preventative Maintenance Check Sheet, Rev D
DATE: 3/27/97 SYSTEM RTC CODE: CMP-SCRUB.C1 TECH. NAME: Dave Whitford (DW)
Brian Jubinville (BJ)
6.1 Perform Weekly PM Completed: DW/BJ
6.3 Perform Quarterly PM Completed: DW/BJ
6.4.1 Check all EMO's for functionality Completed: DW
6.4.2 Check all interlocks for functionality Completed: DW
6.4.3 Check heat lamp housing/wiring for defects Completed: DW
6.4.4 Check the robot hardware/wiring for defects Completed: DW
6.4.5 Check the spindle bearings/bushings Completed: DW
6.4.6 Check the spin sta. rollers/bearings/bushings Completed: DW
6.4.7 Check the brush sta. drive bearings/bushings Completed: DW
6.4.8 Check the +5 VDC power supply Pre-Adjust: +5.1 DW
Post-Adjust: +5.1 DW
6.4.9 Check the -12 VDC power supply Pre-Adjust: -12.6 DW
6.4.10 Check the +12 VDC power supply Pre-Adjust: +12.4 DW
6.4.11 Check the +24 VDC power supply Pre-Adjust: +23.94 DW
Post-Adjust: +24.2 DW
6.4.12 Check the +48 VDC power supply Pre-Adjust: +48.4 DW
Post-Adjust: +48.4 DW
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Quarterly Preventative Maintenance Check Sheet, Rev D
DATE: 3/27/97 SYSTEM RTC CODE: CMP-SCRUB.C1 TECH. NAME: Dave Whitford (DW)
Brian Jubinville (BJ)
6.1 Perform Weekly PM Completed: DW
6.3.1 Check muffin fans for functionality Completed: DW
6.3.2 Check motor drive belts for defects Completed: DW
6.3.3 Check the robot knife for loose hardware Completed: DW
6.3.4 Check the spin station grippers Completed: DW
6.3.5 Check the motor speed output readings Completed: DW/BJ
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 3/27/97 SYSTEM RTC CODE: CMP-SCRUB.C1 TECH. NAME: Dave Whitford (DW)
Brian Jubinville (BJ)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 DW
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 32.5 * DW
6.1.3 Check the Drip Pan for contamination Completed: DW
6.1.4 Check all tubing/fittings for leaks Completed: DW
6.1.5 Check all wafer transport belts Completed: DW
6.1.6 Clean the Send module and Scrub modules Completed: DW
6.1.7 Check scrub brushes for contamination Completed: DW
6.1.8 Check scrub brush height in both modules Completed: BJ
=============================================================================
6.1.2 - DI pressure below spec. E.E. notified....
|
| 55.36 | WW40 Weekly PM Completed | FABSIX::R_POIRIER | | Tue Apr 01 1997 01:22 | 32 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:04/01/97 SYSTEM RTC CODE:CMP-SCRUB.C1 TECH: Roger Poirier (RP)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 RP
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 32 RP
6.1.3 Check the Drip Pan for contamination Completed: RP
6.1.4 Check all tubing/fittings for leaks Completed: RP
6.1.5 Check all wafer transport belts Completed: RP
6.1.6 Clean the Send module and Scrub modules Completed: RP
6.1.7 Check scrub brushes for contamination Completed: RP
6.1.8 Check scrub brush height in both modules Completed: RP
OB IB
---- ----
Brush Heights: Front 318 375
Rear 360 375
Comments: 6.1.2 Water Pressure low. Engineer informed.
Found small puddle of water. Cleaned it up. Tightened
Sender spray connector. Engineer informed.
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| 55.37 | WEEKLY PM FOR WW41 COMPLETED | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Apr 10 1997 05:07 | 30 |
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OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:04/10/97 SYSTEM RTC CODE:CMP-SCRUB.C1 TECH: Brian Jubinville (BJ)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BJ
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 34 BJ
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: BJ
OB IB
---- ----
Brush Heights: Front 335 375
Rear 395 390
Comments: 6.1.2 Water Pressure low. Engineer informed.
|
| 55.38 | WEEKLY PM COMPLETED FOR WW42 | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Apr 17 1997 04:33 | 28 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:04/17/97 SYSTEM RTC CODE:CMP-SCRUB.C1 TECH: Brian Jubinville (BJ)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BJ
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40 BJ
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: BJ
OB IB
---- ----
Brush Heights: Front 335 375
Rear 400 395
|
| 55.39 | WEEKLY PM FOR WW43 COMPLETED | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Wed Apr 23 1997 21:17 | 29 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:04/23/97 SYSTEM RTC CODE:CMP-SCRUB.C1 TECH: Brian Jubinville (BJ)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BJ
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40 BJ
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: BJ
OB IB
---- ----
Brush Heights: Front 335 375
Rear 400 390
|
| 55.40 | ww44 weekly pm completed. | FABSIX::L_SHKOLNIKOV | | Tue Apr 29 1997 21:41 | 32 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:04/29/97 SYSTEM RTC CODE:CMP-SCRUB.C1 TECH: Leon Shkolnikov (ls)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 ls
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40 ls
6.1.3 Check the Drip Pan for contamination Completed: ls
6.1.4 Check all tubing/fittings for leaks Completed: ls*
6.1.5 Check all wafer transport belts Completed: ls
6.1.6 Clean the Send module and Scrub modules Completed: ls
6.1.7 Check scrub brushes for contamination Completed: ls
6.1.8 Check scrub brush height in both modules Completed: ls
OB IB
---- ----
Brush Heights: Front 335 375
Rear 400 390
* Found small amount of DI water under the rear shaft of the outside
brush station. Will notify EE in the morning to schedule down time for
repair.
|
| 55.41 | Weekly PM completed for WW45 | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Wed May 07 1997 22:43 | 37 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:05/7/97 SYSTEM RTC CODE:CMP-SCRUB.C1 TECH: Brian Jubinville (BJ)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BJ
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40 BJ
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: * BJ *
OB IB
---- ----
were at: Front 335 390
Rear 400 440
now back Front 335 375
at: Rear 400 390
* alot of wafer debris found in the spin station. It was
was definetly an un-document crash in the spin station.
All of the wafer pieces were removed and spin are cleaned.
* this checksheet was forwarded to Jim T., E.E.
|
| 55.42 | Weekly pm completed for ww46 | FABSIX::R_GEE | | Tue May 13 1997 09:24 | 29 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:05/13/97 SYSTEM RTC CODE:CMP-SCRUB.C1 TECH: Bob Gee (BG)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BG
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40 BG
6.1.3 Check the Drip Pan for contamination Completed: BG
6.1.4 Check all tubing/fittings for leaks Completed: BG
6.1.5 Check all wafer transport belts Completed: BG
6.1.6 Clean the Send module and Scrub modules Completed: BG
6.1.7 Check scrub brushes for contamination Completed: BG
6.1.8 Check scrub brush height in both modules Completed: BG
OB IB
---- ----
Front 335 395
Rear 400 390
|
| 55.43 | ww47 weekly pm. | FABSIX::L_SHKOLNIKOV | | Wed May 21 1997 22:58 | 30 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:05/21/97 SYSTEM RTC CODE:CMP-SCRUB.C1 TECH: Leon Shkolnikov ls
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 ls
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40 ls
6.1.3 Check the Drip Pan for contamination Completed: ls
6.1.4 Check all tubing/fittings for leaks Completed: ls
6.1.5 Check all wafer transport belts Completed: ls
6.1.6 Clean the Send module and Scrub modules Completed: ls
6.1.7 Check scrub brushes for contamination Completed: ls
6.1.8 Check scrub brush height in both modules Completed: ls
OB IB
---- ----
Front 335 395
Rear 400 390
|
| 55.44 | WW48 weekly PM completed | FABSIX::R_GEE | | Tue May 27 1997 13:09 | 29 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:05/27/97 SYSTEM RTC CODE:CMP-SCRUB.C1 TECH: Bob Gee bg
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 bg
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40 bg
6.1.3 Check the Drip Pan for contamination Completed: bg
6.1.4 Check all tubing/fittings for leaks Completed: bg
6.1.5 Check all wafer transport belts Completed: bg
6.1.6 Clean the Send module and Scrub modules Completed: bg
6.1.7 Check scrub brushes for contamination Completed: bg
6.1.8 Check scrub brush height in both modules Completed: bg
OB IB
---- ----
Front 337 396
Rear 400 390
|
| 55.45 | scruber c1 start up | FABSIX::B_FINN | | Tue May 27 1997 18:38 | 26 |
|
CMP-SCRUB.A1/.A2/.A3/.C1-7 STARTUP CHECKSHEET FOR 5/27/97
---------------------------------------------------------
Tech. Date
------- -------
1. Ensure that all necessary facilities are
available and ready to use. BF/TL 5/27/97
2. Power up each system. BF/TL 5/27/97
3. Re-install PVA scrub brushes. BF/TL 5/27/97
4. Open incoming DI Water Valve(s) to each
system. BF/TL 5/27/97
5. Close UDR valve at each system. BF/TL 5/27/97
6. Cycle a minimum of 25 wafers through each
tool to verify proper operation. BF/TL 5/27/97
7. Notify Operations that the systems are ready
for MQC. BF/TL 5/27/97
8. Enter checksheet into notesfile. BF/TL 5/27/97
|
| 55.46 | WW49 WEEKLY P.M. COMPLETED | FABSIX::R_GEE | | Tue Jun 03 1997 18:18 | 29 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:06/03/97 SYSTEM RTC CODE:CMP-SCRUB.C1 TECH: Bob Gee bg
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 bg
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40 bg
6.1.3 Check the Drip Pan for contamination Completed: bg
6.1.4 Check all tubing/fittings for leaks Completed: bg
6.1.5 Check all wafer transport belts Completed: bg
6.1.6 Clean the Send module and Scrub modules Completed: bg
6.1.7 Check scrub brushes for contamination Completed: bg
6.1.8 Check scrub brush height in both modules Completed: bg
OB IB
---- ----
Front 337 396
Rear 400 390
|