| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 50.1 | Weekly PM Checksheet Template | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Tue Jun 11 1996 23:04 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:__________ SYSTEM RTC CODE:__________ TECH. NAME:__________________
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:__________
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:__________
6.1.3 Check the Drip Pan for contamination Completed:___________
6.1.4 Check all tubing/fittings for leaks Completed:___________
6.1.5 Check all wafer transport belts Completed:___________
6.1.6 Clean the Send module and Scrub modules Completed:___________
6.1.7 Check scrub brushes for contamination Completed:___________
6.1.8 Check scrub brush height in both modules Completed:___________
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
|
| 50.2 | Quarterly PM Checksheet Template | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Tue Jun 11 1996 23:06 | 36 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Quarterly Preventative Maintenance Check Sheet, Rev D
DATE:__________ SYSTEM RTC CODE:__________ TECH. NAME:__________________
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:__________
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:__________
6.1.3 Check the Drip Pan for contamination Completed:___________
6.1.4 Check all tubing/fittings for leaks Completed:___________
6.1.5 Check all wafer transport belts Completed:___________
6.1.6 Clean the Send module and Scrub modules Completed:___________
6.1.7 Check scrub brushes for contamination Completed:___________
6.1.8 Check scrub brush height in both modules Completed:___________
6.3.1 Check muffin fans for functionality Completed:___________
6.3.2 Check motor drive belts for defects Completed:___________
6.3.3 Check the robot knife for loose hardware Completed:___________
6.3.4 Check the spin station grippers Completed:___________
6.3.5 Check the motor speed output readings Completed:___________
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
|
| 50.3 | Semi-Annual PM Checksheet Template | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Tue Jun 11 1996 23:06 | 66 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Semi-Annual Preventative Maintenance Check Sheet, Rev D
DATE:__________ SYSTEM RTC CODE:__________ TECH. NAME:__________________
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:__________
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:__________
6.1.3 Check the Drip Pan for contamination Completed:___________
6.1.4 Check all tubing/fittings for leaks Completed:___________
6.1.5 Check all wafer transport belts Completed:___________
6.1.6 Clean the Send module and Scrub modules Completed:___________
6.1.7 Check scrub brushes for contamination Completed:___________
6.1.8 Check scrub brush height in both modules Completed:___________
6.3.1 Check muffin fans for functionality Completed:___________
6.3.2 Check motor drive belts for defects Completed:___________
6.3.3 Check the robot knife for loose hardware Completed:___________
6.3.4 Check the spin station grippers Completed:___________
6.3.5 Check the motor speed output readings Completed:___________
6.4.1 Check all EMO's for functionality Completed:___________
6.4.2 Check all interlocks for functionality Completed:___________
6.4.3 Check heat lamp housing/wiring for defects Completed:___________
6.4.4 Check the robot hardware/wiring for defects Completed:___________
6.4.5 Check the spindle bearings/bushings Completed:___________
6.4.6 Check the spin sta. rollers/bearings/bushings Completed:___________
6.4.7 Check the brush sta. drive bearings/bushings Completed:___________
6.4.8 Check the +5 VDC power supply Pre-Adjust:__________
Post-Adjust:_________
6.4.9 Check the -12 VDC power supply Pre-Adjust:__________
6.4.10 Check the +12 VDC power supply Pre-Adjust:__________
6.4.11 Check the +24 VDC power supply Pre-Adjust:__________
Post-Adjust:_________
6.4.12 Check the +48 VDC power supply Pre-Adjust:__________
Post-Adjust:_________
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
|
| 50.4 | WW5 WEEKLY PM | FABSIX::L_SHKOLNIKOV | | Wed Jul 31 1996 23:20 | 24 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:07/31/96 SYSTEM RTC CODE:CMP_SCRUB.B3 TECH. NAME: D shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_50_
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_34_
6.1.3 Check the Drip Pan for contamination Completed:__X__
6.1.4 Check all tubing/fittings for leaks Completed:__X__
6.1.5 Check all wafer transport belts Completed:__X__
6.1.6 Clean the Send module and Scrub modules Completed:__X__
6.1.7 Check scrub brushes for contamination Completed:__X__
6.1.8 Check scrub brush height in both modules Completed:__X__
Comments: BRUSH HEIGHTS OB IB
R 448 505
F 440 473
|
| 50.5 | WW06 Weekly PM | FABSIX::R_POIRIER | | Mon Aug 05 1996 04:10 | 25 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:08/05/96 SYSTEM RTC CODE:CMP_SCRUB.B3 TECH. NAME: B shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_50_
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_34_
6.1.3 Check the Drip Pan for contamination Completed:__X__
6.1.4 Check all tubing/fittings for leaks Completed:__X__
6.1.5 Check all wafer transport belts Completed:__X__
6.1.6 Clean the Send module and Scrub modules Completed:__X__
6.1.7 Check scrub brushes for contamination Completed:__X__
6.1.8 Check scrub brush height in both modules Completed:__X__
Comments: BRUSH HEIGHTS OB IB
R 448 505
F 440 473
|
| 50.6 | WW VII - Weekly version | SUBPAC::LANDRY | | Sun Aug 11 1996 13:04 | 25 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 08/11/96 SYSTEM RTC CODE: CMP_SCRUB.B3 TECH NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 33
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: BRUSH HEIGHTS OB IB
R 435 487
F 440 473
|
| 50.7 | QUARTERLY PM FOR WW8 COMPLETED. | FABSIX::L_SHKOLNIKOV | | Fri Aug 23 1996 07:18 | 39 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Quarterly Preventative Maintenance Check Sheet, Rev D
DATE: 8/23/96 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH/SHIFT: D
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 32
6.1.3 Check the Drip Pan for contamination Completed: __X__
6.1.4 Check all tubing/fittings for leaks Completed: __X__
6.1.5 Check all wafer transport belts Completed: __X__
6.1.6 Clean the Send module and Scrub modules Completed: __X__
6.1.7 Check scrub brushes for contamination Completed: __X__
6.1.8 Check scrub brush height in both modules Completed: __X__
6.3.1 Check muffin fans for functionality Completed: __X__
6.3.2 Check motor drive belts for defects Completed: __X__
6.3.3 Check the robot knife for loose hardware Completed: __X__
6.3.4 Check the spin station grippers Completed: __X__
6.3.5 Check the motor speed output readings Completed: __X__
Comments: Brush heights O I
R 435 487
F 440 473
INSIDE BRUSH ST. FRONT LOWER ROLLER ARM BROKEN.WILL REPLACE IT
TONIGHT.
|
| 50.8 | WW IX - Weekly version | SUBPAC::LANDRY | | Sun Aug 25 1996 13:05 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 8/25/96 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 32
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Found a puddle on frame underneath IB station.
OB IB
Brush Heights: Front 435 473
Rear 435 487
|
| 50.9 | CMP-SCRUB.A3 SHUTDOWN CHECKSHEET | FABSIX::R_POIRIER | | Mon Sep 02 1996 01:57 | 20 |
|
CMP-SCRUB.A1/.A1/.A3/.C1-7 SHUTDOWN CHECKSHEET
----------------------------------------------
Tech. Date
------- -------
1. Close main incoming DI Water valve to each
system and open the DI Water return valve
(UDR). This will allow all incoming DI Water
to flow to UDR. ___B___ _9/1/96_
2. Remove all PVA scrub brushes and submerge
in DI water. Label each brush with the
tool name. ___B___ _9/1/96_
3. Perform a complete wipe down and dry of
all wet surfaces. ___B___ _9/1/96_
4. Power down each system. ___B___ _9/1/96_
5. Enter checksheet into notesfile. ___B___ _9/1/96_
|
| 50.10 | | FABSIX::B_FINN | | Tue Sep 03 1996 19:18 | 24 |
|
CMP-SCRUB.A3 STARTUP CHECKSHEET
--------------------------------
DATE 9/3/96 TECH. NAME: A shift
1. Ensure that all necessary facilities are
available and ready to use. ___X___
2. Power up system. ___X___
3. Re-install PVA scrub brushes. ___X____
4. Open incoming DI Water Valve(s)
system. ___X___
5. Close UDR valve at system. ___X___
6. Change RTC status to VERIFY and notify
Operations that the systems are ready
for MQC. ___X___
|
| 50.11 | WW X - Weekly version | SUBPAC::LANDRY | | Tue Sep 03 1996 19:29 | 25 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9/3/96 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 30
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Brush Heights: Front 440 473
Rear 435 487
|
| 50.12 | WW XI - Weekly | SUBPAC::LANDRY | | Sun Sep 08 1996 17:21 | 25 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9/8/96 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 32
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Brush Heights: Front 440 473
Rear 435 487
|
| 50.13 | Scrub .A3 Weekly PM complete | FABSIX::O_WHITFORD | | Wed Sep 18 1996 23:48 | 29 |
| -< CMP >-
================================================================================
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9/18/96 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME:Dave Whitford
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 32
6.1.3 Check the Drip Pan for contamination Completed: DW
6.1.4 Check all tubing/fittings for leaks Completed: DW
6.1.5 Check all wafer transport belts Completed: DW
6.1.6 Clean the Send module and Scrub modules Completed: DW
6.1.7 Check scrub brushes for contamination Completed: DW
6.1.8 Check scrub brush height in both modules Completed: DW
Comments: Outer Brush height .440"
Inner Brush height .473"
P.M. Copmplete
|
| 50.14 | WW XIII - Weekly | SUBPAC::LANDRY | | Mon Sep 23 1996 16:26 | 24 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9/23/96 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 30
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: OB = Front 440 IB = Front 473
Rear 435 Rear 487
|
| 50.15 | Weekly PM completed for WW14 | FABSIX::B_JUBINVILLE | | Fri Oct 04 1996 05:17 | 33 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/3/96 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: D. Whitford
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 PSI
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 27 PSI
6.1.3 Check the Drip Pan for contamination Completed: DW
6.1.4 Check all tubing/fittings for leaks Completed: DW
6.1.5 Check all wafer transport belts Completed: DW
6.1.6 Clean the Send module and Scrub modules Completed: DW
6.1.7 Check scrub brushes for contamination Completed: DW
6.1.8 Check scrub brush height in both modules Completed: DW
Comments: Outer Brush Station Brush height F-440 R-435
Inner Brush Station brush height F-473 R-487
Incoming DI supply is @ 13 PSI lower than spec. Re-filled
gauge gaurd and PSI went to 37 PSI
__________________________________________________________________
__________________________________________________________________
Weekly PM complete Dave Whitford
|
| 50.16 | WW XV - Weekly completed | SUBPAC::LANDRY | | Wed Oct 09 1996 10:55 | 27 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/9/96 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 35
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Rear 435 487
Front 440 473
|
| 50.17 | WW 16 weekly p.m. completed | FABSIX::R_GEE | | Mon Oct 14 1996 17:35 | 27 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/14/96 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 35
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Rear 435 487
Front 440 473
|
| 50.18 | WW XVII - Weekly completed | SUBPAC::LANDRY | | Sun Oct 20 1996 17:19 | 27 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/20/96 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: Gee / Landry
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 34
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Rear 435 487
Front 440 473
|
| 50.19 | WW XVIII - Weekly Completed | SUBPAC::LANDRY | | Sun Oct 27 1996 10:16 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/27/96 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: Landry
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 35
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Rear 435 487
Front 440 473
|
| 50.20 | WW 19 - Weekly completed | SUBPAC::LANDRY | | Tue Nov 05 1996 13:09 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/5/96 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: Gee / Landry
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 34
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Rear 435 487
Front 440 473
|
| 50.21 | WEEKLY PM FOR WW20 COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Tue Nov 12 1996 21:23 | 31 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/12/96 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: Jubinville BJ
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 34/34 BJ
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: BJ
Comments:
OB IB
Brush Heights: Front 440 473
Rear 435 487
BRUSHES CHANGED ON 10/21 HENCE THE DIFFERENCE IN BRUSH
HEIGHTS FROM LAST WEEKS WEEKLY PM.
----------------------------------
|
| 50.22 | SEMI PM WW21 | FABSIX::M_RIDLON | Eliminate the oblivious | Wed Nov 20 1996 01:08 | 91 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/20/96 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: R.Poirier, Ridlon
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 43
6.1.3 Check the Drip Pan for contamination Completed: XX
6.1.4 Check all tubing/fittings for leaks Completed: XX
6.1.5 Check all wafer transport belts Completed: XX
6.1.6 Clean the Send module and Scrub modules Completed: XX
6.1.7 Check scrub brushes for contamination Completed: XX
6.1.8 Check scrub brush height in both modules Completed: SEE BELOW
Comments: IF = 473 IB = 487
OF = 440 OB = 425
__________________________________________________________________
__________________________________________________________________
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Quarterly Preventative Maintenance Check Sheet, Rev D
6.1 Perform Weekly PM Completed: XX
6.3.1 Check muffin fans for functionality Completed: XX
6.3.2 Check motor drive belts for defects Completed: XX
6.3.3 Check the robot knife for loose hardware Completed: XX
6.3.4 Check the spin station grippers Completed: XX
6.3.5 Check the motor speed output readings Completed: XX
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Semi-Annual Preventative Maintenance Check Sheet, Rev D
6.1 Perform Weekly PM Completed: XX
6.3 Perform Quarterly PM Completed: XX
6.4.1 Check all EMO's for functionality Completed: XX
6.4.2 Check all interlocks for functionality Completed: XX
6.4.3 Check heat lamp housing/wiring for defects Completed: XX
6.4.4 Check the robot hardware/wiring for defects Completed: XX
6.4.5 Check the spindle bearings/bushings Completed: XX
6.4.6 Check the spin sta. rollers/bearings/bushings Completed: XX
6.4.7 Check the brush sta. drive bearings/bushings Completed: XX
6.4.8 Check the +5 VDC power supply Pre-Adjust: 4.94
Post-Adjust:
6.4.9 Check the -12 VDC power supply Pre-Adjust: -13.01
6.4.10 Check the +12 VDC power supply Pre-Adjust: 12.94
6.4.11 Check the +24 VDC power supply Pre-Adjust: 24.35
Post-Adjust:
6.4.12 Check the +48 VDC power supply Pre-Adjust: 48.2
Post-Adjust:
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
|
| 50.23 | WW 22 - Weekly completed | SUBPAC::LANDRY | | Sun Nov 24 1996 13:33 | 27 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/24/96 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: Finn, Landry
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 34
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Brush Heights: Front 440 473
Rear 435 487
|
| 50.24 | WW 23 - Weekly completed | SUBPAC::LANDRY | | Sun Dec 01 1996 18:35 | 27 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/1/96 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: Landry/Finn/Gee
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 33
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Brush Heights: Front 440 473
Rear 435 487
|
| 50.25 | WEEKLY PM FOR WW24 COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Dec 11 1996 00:19 | 28 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/11/96 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: JUBINVILLE
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 JUBINVILLE
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 33 JUBINVILLE
6.1.3 Check the Drip Pan for contamination Completed: JUBINVILLE
6.1.4 Check all tubing/fittings for leak Completed: JUBINVILLE
6.1.5 Check all wafer transport belts Completed: JUBINVILLE
6.1.6 Clean the Send module and Scrub modules Completed: JUBINVILLE
6.1.7 Check scrub brushes for contamination Completed: JUBINVILLE
6.1.8 Check scrub brush height in both modules Completed: JUBINVILLE
Comments: Replaced the rear (left) roller arm in the OUTSIDE brush
station.
OB IB
Brush Heights: Front 440 473
Rear 435 487
|
| 50.26 | WW XXV - Weekly completed | SUBPAC::LANDRY | | Sun Dec 15 1996 14:44 | 32 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/15/96 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: Finn / Landry
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 32
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leak Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Found water in the drip pan in several places. Tightened fittings
on distribution manifold. Also noticed water dripping from the
send station, location is on the wafer exit side. Water appears
to be coming from the wafer exit slot.
OB IB
---- ----
Brush Heights: Front 440 473
Rear 435 487
|
| 50.27 | weekly ww26 | FABSIX::M_RIDLON | Eliminate the oblivious | Mon Dec 23 1996 01:58 | 29 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/23/96 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: Ridlon
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 32.5
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leak Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
OB IB
---- ----
Brush Heights: Front 440 473
Rear 435 487
Comments: Found and repaired a small leak coming from the union fitting on
NH4OH pressure gauge.
|
| 50.28 | cmp-scrub.a3 shutdown checksheet completed | FABSIX::R_GEE | | Tue Dec 31 1996 16:01 | 23 |
|
CMP-SCRUB.A1/.A2/.A3/.C1-7 SHUTDOWN CHECKSHEET Tech: Tim Landry
---------------------------------------------- Bob Gee
Tech. Date
------- -------
1. Close main incoming DI Water valve(s) to each
system and open the DI Water return valve
(UDR). This will allow all incoming DI Water
to flow to UDR. Tim Landry 12/31/96
2. Remove all PVA scrub brushes and submerge Bob Gee 12/31/96
in a mixture of DI water and H2O2. Label
each brush with the tool name and brush box
location.
3. Perform a complete wipe down and dry of
all wet surfaces. Tim Landry 12/31/96
4. Power down each system. Tim Landry 12/31/96
5. Enter checksheet into notesfile. Bob Gee 12/31/96
|
| 50.29 | WEEKLY PM COMPLETED FOR WW27 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jan 02 1997 07:40 | 29 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/1/97 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: Olin Whitford (OW)
Brian Jubinville (BJ)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50/OW
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40/38/BJ
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: OW
OB IB
---- ----
Brush Heights: Front 440 473
Rear 435 488
Comments:
|
| 50.30 | weekly ww28 | FABSIX::M_RIDLON | Eliminate the oblivious | Tue Jan 07 1997 02:23 | 30 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/7/97 SYSTEM RTC CODE:CMP-SCRUB.A3 TECH. NAME: Mitch Ridlon
Albert Quillen
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:____52____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:____34____
6.1.3 Check the Drip Pan for contamination Completed:___MR,AQ___
6.1.4 Check all tubing/fittings for leaks Completed:___MR,AQ___
6.1.5 Check all wafer transport belts Completed:___MR,AQ___
6.1.6 Clean the Send module and Scrub modules Completed:___MR,AQ___
6.1.7 Check scrub brushes for contamination Completed:___MR,AQ___
6.1.8 Check scrub brush height in both modules Completed:___MR,AQ___
OUTSIDE INSIDE
FRONT 440 473
REAR 435 487
Comments:
6.1.2 The DI water gauge was replaced due to nonfunctionality.
ENGINEER INFORMED.
|
| 50.31 | Weekly PM complete for WW29 | FABSIX::O_WHITFORD | Quticherwhinin' | Wed Jan 15 1997 21:22 | 32 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/15/1997 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: DAVE WHITFORD (DW)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 DW
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 36* DW
6.1.3 Check the Drip Pan for contamination Completed: DW
6.1.4 Check all tubing/fittings for leaks Completed: DW
6.1.5 Check all wafer transport belts Completed: DW
6.1.6 Clean the Send module and Scrub modules Completed: DW
6.1.7 Check scrub brushes for contamination Completed: DW
6.1.8 Check scrub brush height in both modules Completed: DW
Comments: BRUSH HEIGHTS
OUTER STATION
INSIDE = .430
OUTSIDE = .435
INNER STATION
INSIDE = .473
OUTSIDE = .487
NOTE: EE WAS NOTIFIED OF DI WATER PRESSURE DISCREPANCY
|
| 50.32 | WW30 WEEKLY PM COMPLETED | FABSIX::R_POIRIER | | Mon Jan 20 1997 21:41 | 33 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/20/97 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: ROGER POIRIER(RP)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 RP
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 33* RP
6.1.3 Check the Drip Pan for contamination Completed: RP
6.1.4 Check all tubing/fittings for leaks Completed: RP
6.1.5 Check all wafer transport belts Completed: RP
6.1.6 Clean the Send module and Scrub modules Completed: RP
6.1.7 Check scrub brushes for contamination Completed: RP
6.1.8 Check scrub brush height in both modules Completed: RP
Comments: BRUSH HEIGHTS
OUTER STATION
FRONT = .435
BACK = .430
INNER STATION
FRONT = .473
BACK = .487
* NOTE: 6.1.2 EE HAS BEEN NOTIFIED OF DI WATER PRESSURE DISCREPANCY
|
| 50.33 | WW31 Weekly PM | FABSIX::R_POIRIER | | Wed Jan 29 1997 07:12 | 37 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/28/97 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: ROGER POIRIER(RP)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 RP
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 32* RP
6.1.3 Check the Drip Pan for contamination Completed: RP/MR
6.1.4 Check all tubing/fittings for leaks Completed: RP
6.1.5 Check all wafer transport belts Completed: RP
6.1.6 Clean the Send module and Scrub modules Completed: RP
6.1.7 Check scrub brushes for contamination Completed: RP
6.1.8 Check scrub brush height in both modules Completed: RP
Comments: BRUSH HEIGHTS
OUTER STATION
FRONT = .440
BACK = .435
INNER STATION
FRONT = .473
BACK = .487
* NOTE: 6.1.2 EE HAS BEEN NOTIFIED OF DI WATER PRESSURE DISCREPANCY
NOTE: Small water leak found under Outside Brush Exit Pneumatic valve.
Tightened teflon screw and leak stopped. Wiped up excess water.
|
| 50.34 | WW32 WEEKLY PM | FABSIX::J_SADIN | Freedom isn't free. | Sun Feb 02 1997 18:02 | 37 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 2/2/97 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: JIM SADIN
DOC LANDRY
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 JS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 32* JS
6.1.3 Check the Drip Pan for contamination Completed: TL/JS
6.1.4 Check all tubing/fittings for leaks Completed: TL/JS
6.1.5 Check all wafer transport belts Completed: JS
6.1.6 Clean the Send module and Scrub modules Completed: JS
6.1.7 Check scrub brushes for contamination Completed: JS
6.1.8 Check scrub brush height in both modules Completed: TL
Comments: BRUSH HEIGHTS
OUTER STATION
FRONT = 440
BACK = 435
INNER STATION
FRONT = 473
BACK = .87
* ENG NOTIFIED
|
| 50.35 | WW #33 weekly PM | FABSIX::O_WHITFORD | Lead, follow or step aside. | Thu Feb 13 1997 06:01 | 39 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 2/13/95 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: Dave Whitford
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 DW
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 32* DW
6.1.3 Check the Drip Pan for contamination Completed: DW
6.1.4 Check all tubing/fittings for leaks Completed: DW
6.1.5 Check all wafer transport belts Completed: DW
6.1.6 Clean the Send module and Scrub modules Completed: DW
6.1.7 Check scrub brushes for contamination Completed: DW
6.1.8 Check scrub brush height in both modules Completed: DW
Comments:
Brush heights
Outer Station
Inside = .441
Outside= .435
Inner Station
Inside = .473
Outside= .435
* Equipment engineer has been made aware that the DI pressure cannot be
adjusted up to the specified 40 PSI
|
| 50.36 | ww34 Quarterly PM completed. | FABSIX::L_SHKOLNIKOV | | Wed Feb 19 1997 01:52 | 45 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Quarterly Preventative Maintenance Check Sheet, Rev D
DATE: 02/19/97 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: Leon Shkolnikov LS
6.1 Perform Weekly PM Completed: LS
6.3.1 Check muffin fans for functionality Completed: LS
6.3.2 Check motor drive belts for defects Completed: LS
6.3.3 Check the robot knife for loose hardware Completed: LS
6.3.4 Check the spin station grippers Completed: LS
6.3.5 Check the motor speed output readings Completed: LS
Comments: Outside brush station: Roller motor speed has been adjusted.
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 02/19/96 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME: Leon Shkolnikov LS
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40 psi
6.1.3 Check the Drip Pan for contamination Completed: LS
6.1.4 Check all tubing/fittings for leaks Completed: LS
6.1.5 Check all wafer transport belts Completed: LS
6.1.6 Clean the Send module and Scrub modules Completed: LS
6.1.7 Check scrub brushes for contamination Completed: LS
6.1.8 Check scrub brush height in both modules Completed: LS
Comments: Inside Brush F-440 R-435
Outside Brush F-473 R-487
|
| 50.37 | ww35 weekly p.m. completed | FABSIX::R_GEE | | Mon Feb 24 1997 18:15 | 42 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 2/24/95 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME:Brendan Finn (BF)
Tim Landry (TL)
Jim Sadin (JS)
Bob Gee (BG)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BG
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 32* BG
6.1.3 Check the Drip Pan for contamination Completed: JS
6.1.4 Check all tubing/fittings for leaks Completed: JS
6.1.5 Check all wafer transport belts Completed: TL
6.1.6 Clean the Send module and Scrub modules Completed: TL
6.1.7 Check scrub brushes for contamination Completed: BF
6.1.8 Check scrub brush height in both modules Completed: BF
Comments:
Brush heights
Outer Station
Front = .441
back = .435
Inner Station
Front = .473
Back = .487
* Equipment engineer has been made aware that the DI pressure cannot be
adjusted up to the specified 40 PSI
|
| 50.38 | ww36 weekly | FABSIX::J_SADIN | Freedom isn't free. | Sun Mar 02 1997 16:55 | 38 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 03/02/97 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH. NAME:Brendan Finn (BF)
Tim Landry (TL)
Jim Sadin (JS)
Bob Gee (BG)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BG
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 37 BG
6.1.3 Check the Drip Pan for contamination Completed: JS
6.1.4 Check all tubing/fittings for leaks Completed: JS
6.1.5 Check all wafer transport belts Completed: TL
6.1.6 Clean the Send module and Scrub modules Completed: TL
6.1.7 Check scrub brushes for contamination Completed: BF
6.1.8 Check scrub brush height in both modules Completed: BF
Comments:
Brush heights
Outer Station
Front = .440
back = .435
Inner Station
Front = .473
Back = .487
|
| 50.39 | WEEKLY PM FOR WW37 COMPLETED | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Mar 13 1997 21:29 | 31 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:03/13/97 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH: Brian Jubinville (BJ)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BJ
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 36 BJ
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: BJ
OB IB
---- ----
Brush Heights: Front 440 475
Rear 435 487
Comments: 6.1.2 * EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
|
| 50.40 | ww38 weekly pm. | FABSIX::L_SHKOLNIKOV | | Wed Mar 19 1997 04:55 | 32 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:03/19/97 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH: Leon Shkolnikov - (ls)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 ls
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 36 ls
6.1.3 Check the Drip Pan for contamination Completed: ls
6.1.4 Check all tubing/fittings for leaks Completed: ls
6.1.5 Check all wafer transport belts Completed: ls
6.1.6 Clean the Send module and Scrub modules Completed: ls
6.1.7 Check scrub brushes for contamination Completed: ls
6.1.8 Check scrub brush height in both modules Completed: ls
OB IB
---- ----
Brush Heights: Front 440 475
Rear 435 487
Comments: 6.1.2 * EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
|
| 50.41 | ww39 weekly p.m. completed | FABSIX::R_GEE | | Mon Mar 24 1997 08:40 | 32 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:03/24/97 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH: Bob Gee - (BG)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BG
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 34 BG
6.1.3 Check the Drip Pan for contamination Completed: BG
6.1.4 Check all tubing/fittings for leaks Completed: BG
6.1.5 Check all wafer transport belts Completed: BG
6.1.6 Clean the Send module and Scrub modules Completed: BG
6.1.7 Check scrub brushes for contamination Completed: BG
6.1.8 Check scrub brush height in both modules Completed: BG
OB IB
---- ----
Brush Heights: Front 440 475
Rear 435 487
Comments: 6.1.2 * EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
|
| 50.42 | WW40 weekly pm completed. | FABSIX::J_SADIN | Freedom isn't free. | Mon Mar 31 1997 09:55 | 32 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:03/31/97 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH: Timothy Landry (TL)
James Sadin (JS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 JS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 34 JS
6.1.3 Check the Drip Pan for contamination Completed: TL
6.1.4 Check all tubing/fittings for leaks Completed: TL
6.1.5 Check all wafer transport belts Completed: JS
6.1.6 Clean the Send module and Scrub modules Completed: TL/JS
6.1.7 Check scrub brushes for contamination Completed: TL
6.1.8 Check scrub brush height in both modules Completed: JS
OB IB
---- ----
Brush Heights: Front 440 475
Rear 435 487
Comments: 6.1.2 * EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
|
| 50.43 | WW41 weekly pm completed | FABSIX::J_SADIN | Freedom isn't free. | Wed Apr 09 1997 09:59 | 34 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:04/09/97 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH: Timothy Landry (TL)
James Sadin (JS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 JS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 34 JS
6.1.3 Check the Drip Pan for contamination Completed: TL
6.1.4 Check all tubing/fittings for leaks Completed: TL
6.1.5 Check all wafer transport belts Completed: JS
6.1.6 Clean the Send module and Scrub modules Completed: TL/JS
6.1.7 Check scrub brushes for contamination Completed: TL
6.1.8 Check scrub brush height in both modules Completed: JS
OB IB
---- ----
Brush Heights: Front 440 475
Rear 435 487
Comments: 6.1.2 * EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
|
| 50.44 | WEEKLY PM COMPLETED FOR WW42 | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Apr 17 1997 04:30 | 34 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:04/17/97 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH: Brian Jubinville (BJ)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BJ
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 34 BJ
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: BJ
OB IB
---- ----
Brush Heights: Front 440 475
Rear 435 487
Comments: 6.1.2 * EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
|
| 50.45 | WEEKLY PM COMPLETED FOR WW43 | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Wed Apr 23 1997 21:46 | 35 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:04/23/97 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH: Brian Jubinville (BJ)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BJ
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 36 BJ
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: BJ
OB IB
---- ----
Brush Heights: Front 440 475
Rear 435 487
Comments: 6.1.2 * EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
|
| 50.46 | WW44 weekly pm completed | FABSIX::B_JUBINVILLE | | Wed Apr 30 1997 05:30 | 37 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:04/30/97 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH: Brian Jubinville (BJ)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BJ
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 36 BJ
*
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: BJ
OB IB
---- ----
Brush Heights: Front 440 475
Rear 435 487
Comments: 6.1.2 * EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
|
| 50.47 | WW45 WEEKLY PM COMPLETED | FABSIX::J_SADIN | Freedom isn't free. | Tue May 06 1997 12:17 | 32 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:05/06/97 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH: JAMES SADIN
TIMOTHY LANDRY
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 36
*
6.1.3 Check the Drip Pan for contamination Completed: JS
6.1.4 Check all tubing/fittings for leaks Completed: TL
6.1.5 Check all wafer transport belts Completed: JS
6.1.6 Clean the Send module and Scrub modules Completed: TL
6.1.7 Check scrub brushes for contamination Completed: JS
6.1.8 Check scrub brush height in both modules Completed: TL
OB IB
---- ----
Brush Heights: Front 440 475
Rear 435 487
Comments: 6.1.2 * EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
|
| 50.48 | WW46 weekly pm completed. | FABSIX::J_SADIN | Freedom isn't free. | Tue May 13 1997 09:16 | 35 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:05/13/97 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH: JAMES SADIN
TIMOTHY LANDRY
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 34
*
6.1.3 Check the Drip Pan for contamination Completed: JS
6.1.4 Check all tubing/fittings for leaks Completed: TL
6.1.5 Check all wafer transport belts Completed: JS
6.1.6 Clean the Send module and Scrub modules Completed: TL
6.1.7 Check scrub brushes for contamination Completed: JS
6.1.8 Check scrub brush height in both modules Completed: TL
OB IB
---- ----
Brush Heights: Front 440 475
Rear 435 487
Comments: 6.1.2 * EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
Found mucho water in drip pan (due to known leak between send
station and outside brush station). Cleaned up water and notified
EE of situation.
|
| 50.49 | CMP-SCRUB.A3 SHUTDOWN AND STARTUP CHECKSHEETS | FABSIX::J_SADIN | Freedom isn't free. | Tue May 27 1997 10:11 | 57 |
|
Scrub.A3
CMP-SCRUB.A1/.A2/.A3/.C1 SHUTDOWN CHECKSHEET FOR 5/26/97
--------------------------------------------------------
Tech. Date
------- -------
1. Change Workstream tool status to NON_SCHEDULED
DOWN. If Workstream will not let the tools go
to NON-SCHEDULED, leave the tools at UP IDLE.
DO NO put any tools to SCHEDULED or UNSCHEDULED RP 5-26-97
DOWN. _______ _______
2. Close main incoming DI Water valve(s) to each
system and open the DI Water return valve
(UDR). This will allow all incoming DI Water RP 5-26-97
to flow to UDR. _______ _______
3. Remove all PVA scrub brushes and submerge
in a mixture of DI water and H2O2. Label
each brush with the tool name and brush box RP 5-26-97
location. _______ _______
4. Perform a complete wipe down and dry of RP 5-26-97
all wet surfaces. _______ _______
RP 5-26-97
5. Power down each system. _______ _______
6. Enter checksheet into notesfile.
CMP-SCRUB.A1/.A2/.A3/.C1-7 STARTUP CHECKSHEET FOR 5/27/97
---------------------------------------------------------
Tech. Date
------- -------
1. Ensure that all necessary facilities are tl 5/27
available and ready to use. _______ _______
tl 5/27
2. Power up each system. _______ _______
tl 5/27
3. Re-install PVA scrub brushes. _______ _______
4. Open incoming DI Water Valve(s) to each tl 5/27
system. _______ _______
tl 5/27
5. Close UDR valve at each system. _______ _______
6. Cycle a minimum of 25 wafers through each tl 5/27
tool to verify proper operation. _______ _______
7. Notify Operations that the systems are ready tl 5/27
for MQC. _______ _______
8. Enter checksheet into notesfile. tl 5/27
|
| 50.50 | SEMI-ANNUAL PM FOR WW47 COMPLETED | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Wed May 28 1997 06:27 | 47 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Semi-Annual Preventative Maintenance Check Sheet, Rev D
DATE:5/28/97 TOOL: :CMP-SCRUB.A3 TECH. NAME: John Poirier (JP)
Brian Jubinville (BJ)
6.1 Perform Weekly PM Completed: BJ
6.3 Perform Quarterly PM Completed: BJ
6.4.1 Check all EMO's for functionality Completed: JP
6.4.2 Check all interlocks for functionality Completed: JP
6.4.3 Check heat lamp housing/wiring for defects Completed: JP
6.4.4 Check the robot hardware/wiring for defects Completed: BJ
6.4.5 Check the spindle bearings/bushings Completed: BJ
6.4.6 Check the spin sta. rollers/bearings/bushings Completed: BJ
6.4.7 Check the brush sta. drive bearings/bushings Completed: BJ
6.4.8 Check the +5 VDC power supply Pre-Adjust: 5.01 BJ
Post-Adjust: 5.01 BJ
6.4.9 Check the -12 VDC power supply Pre-Adjust: -12.6 BJ
6.4.10 Check the +12 VDC power supply Pre-Adjust: 12.6 BJ
6.4.11 Check the +24 VDC power supply Pre-Adjust: 23.7 BJ
Post-Adjust: 23.7 BJ
6.4.12 Check the +48 VDC power supply Pre-Adjust: 48.3 BJ
Post-Adjust: 48.3 BJ
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
|
| 50.51 | WEEKLY PM FOR WW48 COMPLETED | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Wed May 28 1997 06:32 | 31 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:05/28/97 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH: Brian Jubinville (BJ)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BJ
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 34 * BJ
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: BJ
OB IB
---- ----
Brush Heights: Front 440 475
Rear 435 487
Comments: 6.1.2 * EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
|
| 50.52 | WW49 weekly pm completed. | FABSIX::J_SADIN | Freedom isn't free. | Mon Jun 02 1997 09:36 | 33 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:06/02/97 SYSTEM RTC CODE: CMP-SCRUB.A3 TECH: JAMES SADIN
TIMOTHY LANDRY
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 34
*
6.1.3 Check the Drip Pan for contamination Completed: JS
6.1.4 Check all tubing/fittings for leaks Completed: TL
6.1.5 Check all wafer transport belts Completed: JS
6.1.6 Clean the Send module and Scrub modules Completed: TL
6.1.7 Check scrub brushes for contamination Completed: JS
6.1.8 Check scrub brush height in both modules Completed: TL
OB IB
---- ----
Brush Heights: Front 440 475
Rear 435 487
Comments: 6.1.2 * EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
|