| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 46.4 | PM of the week | SUBPAC::LANDRY | | Sun Nov 05 1995 18:22 | 23 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/05/95 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Landry/Finn
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:____50____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:__22/32___
6.1.3 Check the Drip Pan for contamination Completed:____X______
6.1.4 Check all tubing/fittings for leaks Completed:____X______
6.1.5 Check all wafer transport belts Completed:____X______
6.1.6 Clean the Send module and Scrub modules Completed:____X______
6.1.7 Check scrub brushes for contamination Completed:____X______
6.1.8 Check scrub brush height in both modules Completed:____X______
Comments:
|
| 46.5 | WW19 Semi-Annual PM | FABSIX::R_POIRIER | | Sun Nov 05 1995 23:08 | 87 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/05/95 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Landry/Finn
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:____50____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:__22/32___
6.1.3 Check the Drip Pan for contamination Completed:____X______
6.1.4 Check all tubing/fittings for leaks Completed:____X______
6.1.5 Check all wafer transport belts Completed:____X______
6.1.6 Clean the Send module and Scrub modules Completed:____X______
6.1.7 Check scrub brushes for contamination Completed:____X______
6.1.8 Check scrub brush height in both modules Completed:____X______
Comments: Brush heights Out Front - 360 Rear - 370
In Front - 340 Rear - 350
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Quarterly Preventative Maintenance Check Sheet, Rev D
DATE: 11-05-95 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: GEE/POIRIER
6.3.1 Check muffin fans for functionality Completed:__DONE_____
6.3.2 Check motor drive belts for defects Completed:__DONE_____
6.3.3 Check the robot knife for loose hardware Completed:__DONE_____
6.3.4 Check the spin station grippers Completed:__DONE_____
6.3.5 Check the motor speed output readings Completed:__DONE_____
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Semi-Annual Preventative Maintenance Check Sheet, Rev D
DATE:_11-05-95 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME:__GEE/POIRIER______
6.4.1 Check all EMO's for functionality Completed:__DONE_____
6.4.2 Check all interlocks for functionality Completed:__DONE_____
6.4.3 Check heat lamp housing/wiring for defects Completed:__DONE_____
6.4.4 Check the robot hardware/wiring for defects Completed:__DONE_____
6.4.5 Check the spindle bearings/bushings Completed:__DONE_____
6.4.6 Check the spin sta. rollers/bearings/bushings Completed:__DONE_____
6.4.7 Check the brush sta. drive bearings/bushings Completed:__DONE_____
6.4.8 Check the +5 VDC power supply Pre-Adjust: +5.00V
Post-Adjust:__N/A____
6.4.9 Check the -12 VDC power supply Pre-Adjust: +11.80V
6.4.10 Check the +12 VDC power supply Pre-Adjust: -12.03V
6.4.11 Check the +24 VDC power supply Pre-Adjust: +24.06V
Post-Adjust:__N/A____
6.4.12 Check the +48 VDC power supply Pre-Adjust: +48.1V
Post-Adjust:__N/A____
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
|
| 46.1 | Weekly PM Checksheet Template | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 08 1995 21:08 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:__________ SYSTEM RTC CODE:__________ TECH. NAME:__________________
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:__________
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:__________
6.1.3 Check the Drip Pan for contamination Completed:___________
6.1.4 Check all tubing/fittings for leaks Completed:___________
6.1.5 Check all wafer transport belts Completed:___________
6.1.6 Clean the Send module and Scrub modules Completed:___________
6.1.7 Check scrub brushes for contamination Completed:___________
6.1.8 Check scrub brush height in both modules Completed:___________
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
|
| 46.6 | weekly p.m. | FABSIX::R_GEE | | Mon Nov 13 1995 22:07 | 23 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/13/95 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: BG/RP
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:____50____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:__30/20___
6.1.3 Check the Drip Pan for contamination Completed:____X______
6.1.4 Check all tubing/fittings for leaks Completed:____X______
6.1.5 Check all wafer transport belts Completed:____X______
6.1.6 Clean the Send module and Scrub modules Completed:____X______
6.1.7 Check scrub brushes for contamination Completed:____X______
6.1.8 Check scrub brush height in both modules Completed:____X______
Comments: Brush heights Out Front - 360 Rear - 370
In Front - 340 Rear - 350
|
| 46.7 | weekly p.m. | FABSIX::R_GEE | | Wed Nov 22 1995 02:06 | 24 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/22/95 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: BG
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 30/21 psi
6.1.3 Check the Drip Pan for contamination Completed:____X______
6.1.4 Check all tubing/fittings for leaks Completed:____X______
6.1.5 Check all wafer transport belts Completed:____X______
6.1.6 Clean the Send module and Scrub modules Completed:____X______
6.1.7 Check scrub brushes for contamination Completed:____X______
6.1.8 Check scrub brush height in both modules Completed:____X______
Comments: INSIDE - 340-F 350-R
OUTSIDE - 360-F 370-R
|
| 46.8 | weekly pm | STRATA::FINN | | Wed Nov 29 1995 18:50 | 24 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/29/95 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Brendan/John p.
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 31/20 psi
6.1.3 Check the Drip Pan for contamination Completed:____X______
6.1.4 Check all tubing/fittings for leaks Completed:____X______
6.1.5 Check all wafer transport belts Completed:____X______
6.1.6 Clean the Send module and Scrub modules Completed:____X______
6.1.7 Check scrub brushes for contamination Completed:____X______
6.1.8 Check scrub brush height in both modules Completed:____X______
Comments: INSIDE - 340-F 350-R
OUTSIDE - 360-F 370-R
|
| 46.9 | pm weekly | STRATA::FINN | | Mon Dec 04 1995 19:08 | 25 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/04/95 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Brendan/Doc
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 30/20 psi
6.1.3 Check the Drip Pan for contamination Completed:____X______
6.1.4 Check all tubing/fittings for leaks Completed:____X______
6.1.5 Check all wafer transport belts Completed:____X______
6.1.6 Clean the Send module and Scrub modules Completed:____X______
6.1.7 Check scrub brushes for contamination Completed:____X______
6.1.8 Check scrub brush height in both modules Completed:____X______
Comments: INSIDE - 340-F 350-R
OUTSIDE - 360-F 370-R
Repaired several small leaking fittings. (H2O)
|
| 46.10 | weekly pm ww24 | STRATA::RIDLON | Eliminate the obvious | Tue Dec 12 1995 05:02 | 25 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/12/95 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: B shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 29/21 psi
6.1.3 Check the Drip Pan for contamination Completed:____X______
6.1.4 Check all tubing/fittings for leaks Completed:____X______
6.1.5 Check all wafer transport belts Completed:____X______
6.1.6 Clean the Send module and Scrub modules Completed:____X______
6.1.7 Check scrub brushes for contamination Completed:____X______
6.1.8 Check scrub brush height in both modules Completed:____X______
Comments: INSIDE - 340-F 350-R
OUTSIDE - 360-F 370-R
|
| 46.11 | WW25 WEEKLY PM | FABSIX::R_POIRIER | | Tue Dec 19 1995 04:46 | 27 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:__12-19-95 __ SYSTEM RTC CODE:_CMP-SCRUB.A1_ TECH. NAME:_GEE/POIRIER___
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:__50psi___
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_30/25 psi_
6.1.3 Check the Drip Pan for contamination Completed:___Done___
6.1.4 Check all tubing/fittings for leaks Completed:___Done___
6.1.5 Check all wafer transport belts Completed:___Done____
6.1.6 Clean the Send module and Scrub modules Completed:___Done____
6.1.7 Check scrub brushes for contamination Completed:___Done____
6.1.8 Check scrub brush height in both modules Completed:___Done____
Comments:____Outside front 360 Outside rear 370
Inside front 340 Inside rear 350
__________________________________________________________________
__________________________________________________________________
|
| 46.12 | No PM necessary for WW26 Fy96 | SUBPAC::TOOKER | | Thu Dec 21 1995 15:09 | 6 |
| Due to the scheduled FAB6 shutdown during Work Week 26 Fiscal Year 1996, no PM will be performed
on CMP-SCRUB.A1.
Jim Tooker
CMP Equipment Engineer
|
| 46.13 | WW27 WEEKLY PM | FABSIX::R_POIRIER | | Tue Jan 02 1996 03:58 | 30 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1-2-96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: "B" SHIFT
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:___50PSI__
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_25/20____
6.1.3 Check the Drip Pan for contamination Completed:__Done_____
6.1.4 Check all tubing/fittings for leaks Completed:__Done_____
6.1.5 Check all wafer transport belts Completed:__Done_____
6.1.6 Clean the Send module and Scrub modules Completed:__Done_____
6.1.7 Check scrub brushes for contamination Completed:__Done_____
6.1.8 Check scrub brush height in both modules Completed:__Done_____
Comments: Outside Front 315 Outside Rear 351
Inside Front 340 Inside Rear 350
__________________________________________________________________
__________________________________________________________________
|
| 46.14 | WW 28 - Weekly | SUBPAC::LANDRY | | Mon Jan 08 1996 15:13 | 23 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/8/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Landry
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:____50____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:__29/22___
6.1.3 Check the Drip Pan for contamination Completed:____X______
6.1.4 Check all tubing/fittings for leaks Completed:____X______
6.1.5 Check all wafer transport belts Completed:____X______
6.1.6 Clean the Send module and Scrub modules Completed:____X______
6.1.7 Check scrub brushes for contamination Completed:____X______
6.1.8 Check scrub brush height in both modules Completed:____X______
Comments:
|
| 46.15 | Weekly PM for WW29 completed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Jan 17 1996 22:12 | 29 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/17/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: LEON, BJ
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_____X____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:___30_____
6.1.3 Check the Drip Pan for contamination Completed:______X____
6.1.4 Check all tubing/fittings for leaks Completed:______X____
6.1.5 Check all wafer transport belts Completed:______X____
6.1.6 Clean the Send module and Scrub modules Completed:______X____
6.1.7 Check scrub brushes for contamination Completed:______X____
6.1.8 Check scrub brush height in both modules Completed:______X____
Comments: Inside brush heights - Front - 340 rear - 350
Outside brush heights - Front - 315 rear - 351
__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
|
| 46.16 | WEEKLY PM FOR A2 COMPLETED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Jan 25 1996 04:24 | 30 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/26/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: D SHIFT
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_____X____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_____35___
6.1.3 Check the Drip Pan for contamination Completed:______X____
6.1.4 Check all tubing/fittings for leaks Completed:______X____
6.1.5 Check all wafer transport belts Completed:______X____
6.1.6 Clean the Send module and Scrub modules Completed:______X____
6.1.7 Check scrub brushes for contamination Completed:______X____
6.1.8 Check scrub brush height in both modules Completed:______X____
Comments: Inside brush heights - Front - 375 rear - 355
Outside brush heights - Front - 360 rear - 366
__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
|
| 46.17 | WEEKLY PM FOR A1 COMPLETED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Jan 25 1996 04:27 | 30 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/26/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: D SHIFT
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_____X____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_____35___
6.1.3 Check the Drip Pan for contamination Completed:______X____
6.1.4 Check all tubing/fittings for leaks Completed:______X____
6.1.5 Check all wafer transport belts Completed:______X____
6.1.6 Clean the Send module and Scrub modules Completed:______X____
6.1.7 Check scrub brushes for contamination Completed:______X____
6.1.8 Check scrub brush height in both modules Completed:______X____
Comments: Inside brush heights - Front - 335 rear - 350
Outside brush heights - Front - 315 rear - 350
__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
|
| 46.18 | 1/29/96 weekly performed | STRATA::FINN | | Mon Jan 29 1996 19:00 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/29/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Finn/Landry
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_____X____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_____35___
6.1.3 Check the Drip Pan for contamination Completed:______X____
6.1.4 Check all tubing/fittings for leaks Completed:______X____
6.1.5 Check all wafer transport belts Completed:______X____
6.1.6 Clean the Send module and Scrub modules Completed:______X____
6.1.7 Check scrub brushes for contamination Completed:______X____
6.1.8 Check scrub brush height in both modules Completed:______X____
Comments: Inside brush heights - Front - 345 rear - 350
Outside brush heights - Front - 315 rear - 350
|
| 46.19 | QUARTERLY PM COMPLETED FOR SCRUB.A1 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Feb 07 1996 03:30 | 27 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Quarterly Preventative Maintenance Check Sheet, Rev D
DATE: 2/7/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: BJ
Complete weelk PM checksheet Completed:_____X_____
6.3.1 Check muffin fans for functionality Completed:_____X_____
6.3.2 Check motor drive belts for defects Completed:_____X_____
6.3.3 Check the robot knife for loose hardware Completed:_____X_____
6.3.4 Check the spin station grippers Completed:_____X_____
6.3.5 Check the motor speed output readings Completed:_____X_____
Comments: Found recipe not set to correct one.
It's suppose to be STRAS_CLEAN_BEST.
Found megasonics power off
Inside brush heights - Front - 345 rear - 350
Outside brush heights - Front - 315 rear - 350
|
| 46.20 | ww33 weekly p.m. | FABSIX::R_GEE | | Mon Feb 12 1996 00:39 | 24 |
|
DATE: 2/12/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: B SHIFT
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_____X____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_____35___
6.1.3 Check the Drip Pan for contamination Completed:______X____
6.1.4 Check all tubing/fittings for leaks Completed:______X____
6.1.5 Check all wafer transport belts Completed:______X____
6.1.6 Clean the Send module and Scrub modules Completed:______X____
6.1.7 Check scrub brushes for contamination Completed:______X____
6.1.8 Check scrub brush height in both modules Completed:______X____
Comments: Inside brush heights - Front - 335 rear - 350
Outside brush heights - Front - 315 rear - 350
|
| 46.21 | WEEKLY PM FOR WW34 COMPLETED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Feb 23 1996 06:06 | 27 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 2/23/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: BJ
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_____X____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_____35___
6.1.3 Check the Drip Pan for contamination Completed:______X____
6.1.4 Check all tubing/fittings for leaks Completed:______X____
6.1.5 Check all wafer transport belts Completed:______X____
6.1.6 Clean the Send module and Scrub modules Completed:______X____
6.1.7 Check scrub brushes for contamination Completed:______X____
6.1.8 Check scrub brush height in both modules Completed:______X____
Comments: Inside brush heights - Front - 335 rear - 350
Outside brush heights - Front - 315 rear - 350
Found front lower roller arm broken in the inside
brush station
|
| 46.22 | ww35 weekly pm completed | FABSIX::L_SHKOLNIKOV | | Thu Feb 29 1996 02:48 | 24 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 2/29/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Leon
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_ 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_ 35 psi
6.1.3 Check the Drip Pan for contamination Completed:___x____
6.1.4 Check all tubing/fittings for leaks Completed:___x____
6.1.5 Check all wafer transport belts Completed:___x____
6.1.6 Clean the Send module and Scrub modules Completed:___x____
6.1.7 Check scrub brushes for contamination Completed:___x____
6.1.8 Check scrub brush height in both modules Completed:___x____
Comments:____Brush heights Outside Rear 350 Outside front 315
Inside rear 350 Inside front 335
|
| 46.23 | weekly pm ww36 | FABSIX::B_FINN | | Mon Mar 04 1996 19:17 | 28 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 3/4/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: a shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_ 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_ 35 psi
6.1.3 Check the Drip Pan for contamination Completed:___x____
6.1.4 Check all tubing/fittings for leaks Completed:___x____
6.1.5 Check all wafer transport belts Completed:___x____
6.1.6 Clean the Send module and Scrub modules Completed:___x____
6.1.7 Check scrub brushes for contamination Completed:___x____
6.1.8 Check scrub brush height in both modules Completed:___x____
Comments: Brush heights Outside Rear 350 Outside front 315
Inside rear 350 Inside front 335
Adjusted exit drips for inner and outer clean stations
|
| 46.24 | WEEKLY PM COMPLETED FOR WW37 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Mon Mar 11 1996 14:03 | 27 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 3/11/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Doc & BJ
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_ 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_ 37 psi
6.1.3 Check the Drip Pan for contamination Completed:___x____
6.1.4 Check all tubing/fittings for leaks Completed:___x____
6.1.5 Check all wafer transport belts Completed:___x____
6.1.6 Clean the Send module and Scrub modules Completed:___x____
6.1.7 Check scrub brushes for contamination Completed:___x____
6.1.8 Check scrub brush height in both modules Completed:___x____
Comments: Brush heights Outside Rear 350 Outside front 315
Inside rear 350 Inside front 335
Adjusted drips for spin station
|
| 46.25 | weekly ww38 | STRATA::RIDLON | Eliminate the obvious | Sun Mar 17 1996 21:49 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 3/17/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: B shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_ 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_ 35 psi
6.1.3 Check the Drip Pan for contamination Completed:___x____
6.1.4 Check all tubing/fittings for leaks Completed:___x____
6.1.5 Check all wafer transport belts Completed:___x____
6.1.6 Clean the Send module and Scrub modules Completed:___x____
6.1.7 Check scrub brushes for contamination Completed:___x____
6.1.8 Check scrub brush height in both modules Completed:___x____
Comments: Brush heights Outside Rear 350 Outside front 315
Inside rear 350 Inside front 335
|
| 46.26 | WW39 Weekly PM | FABSIX::R_POIRIER | | Sun Mar 24 1996 01:11 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 3/24/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: B shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_ 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_ 35 psi
6.1.3 Check the Drip Pan for contamination Completed:___x____
6.1.4 Check all tubing/fittings for leaks Completed:___x____
6.1.5 Check all wafer transport belts Completed:___x____
6.1.6 Clean the Send module and Scrub modules Completed:___x____
6.1.7 Check scrub brushes for contamination Completed:___x____
6.1.8 Check scrub brush height in both modules Completed:___x____
Comments: Brush heights Outside Rear 350 Outside front 315
Inside rear 350 Inside front 335
|
| 46.27 | WW 40 - Weekly style | SUBPAC::LANDRY | | Tue Apr 02 1996 15:19 | 25 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 4/2/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:____50____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:__44/44___
6.1.3 Check the Drip Pan for contamination Completed:____TL_____
6.1.4 Check all tubing/fittings for leaks Completed:____TL_____
6.1.5 Check all wafer transport belts Completed:____TL_____
6.1.6 Clean the Send module and Scrub modules Completed:____TL_____
6.1.7 Check scrub brushes for contamination Completed:____TL_____
6.1.8 Check scrub brush height in both modules Completed:____TL_____
Comments: BRUSH HEIGHTS: IB_F = 335 OB_F = 315
IB_R = 350 OB_R = 350
|
| 46.28 | Weekly PM completed for WW41 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Mon Apr 08 1996 18:56 | 25 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 4/8/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:___50____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:___38____
6.1.3 Check the Drip Pan for contamination Completed:____X_____
6.1.4 Check all tubing/fittings for leaks Completed:____X_____
6.1.5 Check all wafer transport belts Completed:____X_____
6.1.6 Clean the Send module and Scrub modules Completed:____X_____
6.1.7 Check scrub brushes for contamination Completed:____X_____
6.1.8 Check scrub brush height in both modules Completed:____X_____
Comments: BRUSH HEIGHTS: IB_F = 335 OB_F = 315
IB_R = 350 OB_R = 350
Bottom rear roller arm replaced in Outside brush station
|
| 46.29 | WW42 WEEKLY COMPLETED | STRATA::WESTPHAL | | Thu Apr 18 1996 19:27 | 28 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 18 APR 96 SYSTEM RTC CODE:SCRUB-CMP.A1 TECH. NAME: WESTPHAL/SWENSON
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:___50_____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:___41_____
6.1.3 Check the Drip Pan for contamination Completed:____X______
6.1.4 Check all tubing/fittings for leaks Completed:____X______
6.1.5 Check all wafer transport belts Completed:____X______
6.1.6 Clean the Send module and Scrub modules Completed:____X______
6.1.7 Check scrub brushes for contamination Completed:____X______
6.1.8 Check scrub brush height in both modules Completed:____X______
FRONT REAR
INNER BRUSH STATION 335 350
OUTER BRUSH STATION 315 350
Comments: Inside brush station right upper arm has a crack in it. The part
been ordered by engineering.
|
| 46.30 | ww43 pm completed | FABSIX::L_SHKOLNIKOV | | Wed Apr 24 1996 22:07 | 29 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 04/24/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: D shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_ 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_ 38 psi
6.1.3 Check the Drip Pan for contamination Completed:___x____
6.1.4 Check all tubing/fittings for leaks Completed:___x____
6.1.5 Check all wafer transport belts Completed:___x____
6.1.6 Clean the Send module and Scrub modules Completed:___x____
6.1.7 Check scrub brushes for contamination Completed:___x____
6.1.8 Check scrub brush height in both modules Completed:___x____
Comments: Brush heights Outside Rear 350 Outside front 315
Inside rear 350 Inside front 335
** The water coming out from outside brush sration shaft
assembly onto the motor that rotates the rollers.
Will repair when manufacturing give us a time to do that.
|
| 46.31 | WW44 Wekly PM | FABSIX::R_POIRIER | | Mon Apr 29 1996 00:57 | 30 |
| --------------------------------------------------------------------------------
--------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 04/28/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: B shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_ 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_ psi
6.1.3 Check the Drip Pan for contamination Completed:___x____
6.1.4 Check all tubing/fittings for leaks Completed:___x____
6.1.5 Check all wafer transport belts Completed:___x____
6.1.6 Clean the Send module and Scrub modules Completed:___x____
6.1.7 Check scrub brushes for contamination Completed:___x____
6.1.8 Check scrub brush height in both modules Completed:___x____
Comments: Brush heights Outside Rear 350 Outside front 315
Inside rear 350 Inside front 335
Found a water leak in the drain shaft of the Outside Brush station.
There is a hole in the shaft. A new tub will be needed. We filled
the hole with Silicone and it is keeping the water in.
|
| 46.32 | ww45 S/A PM completed? | FABSIX::L_SHKOLNIKOV | | Thu May 09 1996 05:51 | 50 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Semi-Annual Preventative Maintenance Check Sheet, Rev D
DATE: 5/9/96 SYSTEM RTC CODE:cmp-scrub.A1 TECH. NAME: L.S.
6.1 Perform Weekly PM Completed:___X____
6.3 Perform Quarterly PM Completed:___x____
6.4.1 Check all EMO's for functionality Completed:___X____
6.4.2 Check all interlocks for functionality Completed:___X____
6.4.3 Check heat lamp housing/wiring for defects Completed:___X____
6.4.4 Check the robot hardware/wiring for defects Completed:___x____
6.4.5 Check the spindle bearings/bushings Completed:___X____
6.4.6 Check the spin sta. rollers/bearings/bushings Completed:___X____
6.4.7 Check the brush sta. drive bearings/bushings Completed:___X____
6.4.8 Check the +5 VDC power supply Pre-Adjust: 4.95
Post-Adjust: 5.00
6.4.9 Check the -12 VDC power supply Pre-Adjust: -11.96
6.4.10 Check the +12 VDC power supply Pre-Adjust: +12.07
6.4.11 Check the +24 VDC power supply Pre-Adjust: 23.94
Post-Adjust: 24.0
6.4.12 Check the +48 VDC power supply Pre-Adjust: 48.2
Post-Adjust: 48.0
Front Rear
Comments: Brush heights Outside 315 350
Inside 335 350
*** Outside brush station - water leaks through the drive shaft
of the rear arm. Bearing parts was found under the shaft
assembly. A new shaft will be needed.
|
| 46.33 | WW46 Wekly PM | FABSIX::L_SHKOLNIKOV | | Tue May 14 1996 23:55 | 27 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 5/14/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: D shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:__50__
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:__38__
6.1.3 Check the Drip Pan for contamination Completed:___X___
6.1.4 Check all tubing/fittings for leaks Completed:___X___
6.1.5 Check all wafer transport belts Completed:___X___
6.1.6 Clean the Send module and Scrub modules Completed:___X___
6.1.7 Check scrub brushes for contamination Completed:___X___
6.1.8 Check scrub brush height in both modules Completed:___X___
Comments: BRUSH HEIGHTS: IB_F = 335 OB_F = 315
IB_R = 350 OB_R = 350
* Water still leaking through the rear drive shaft of the
outside brush station.
|
| 46.34 | WW 47 - Weekly | SUBPAC::LANDRY | | Sun May 19 1996 12:44 | 24 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 5/19/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 38/37
6.1.3 Check the Drip Pan for contamination Completed:___X___
6.1.4 Check all tubing/fittings for leaks Completed:___X___
6.1.5 Check all wafer transport belts Completed:___X___
6.1.6 Clean the Send module and Scrub modules Completed:___X___
6.1.7 Check scrub brushes for contamination Completed:___X___
6.1.8 Check scrub brush height in both modules Completed:___X___
Comments: BRUSH HEIGHTS: IB_F = 335 OB_F = 315
IB_R = 350 OB_R = 350
|
| 46.35 | SHUTDOWN CHECKSHEET | STRATA::RIDLON | Eliminate the obvious | Mon May 27 1996 06:39 | 22 |
|
CMP-SCRUB.A1 & CMP-SRUB.A2 SHUTDOWN CHECKSHEET
----------------------------------------------
Tech. Date
------- -------
1. Change RTC status to SCHEDULED DOWN. ___B___ __5/27_
2. Remove all PVA scrub brushes and discard. __B____ _______
3. Perform a complete wipe down and dry of
all wet surfaces. ___B___ _______
4. Close main incoming DI Water valve to each
system and open the DI Water return valve
(UDR). This will allow all incoming DI Water
to flow to UDR. ___B___ _______
5. Power down each system. ___B___ _______
6. Enter checksheet into notesfile.
|
| 46.36 | Weekly PM ** note new brushes/heights | SUBPAC::LANDRY | | Tue May 28 1996 18:39 | 25 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 5/28/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: A & B shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 39/39
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: New Brushes installed at this PM.
Brush Heights: OB-front = 315 OB-rear = 350
IB-front = 257 IB-rear = 328
|
| 46.37 | Startup Checksheet | SUBPAC::LANDRY | | Tue May 28 1996 18:55 | 20 |
| CMP-SCRUB.A1 STARTUP CHECKSHEET
----------------------------------------------
Tech. Date
------- -------
1. Ensure that all necessary facilities are
available and ready to use. A shift 5/28/96
2. Power up each system. A shift 5/28/96
3. Open incoming DI Water Valve to each
system. A shift 5/28/96
4. Close UDR valve at each system. A shift 5/28/96
5. Re-install new PVA scrub brushes. A shift 5/28/96
6. Change RTC status to VERIFY and notify
Operations that the systems are ready
for MQC. A shift 5/28/96
|
| 46.38 | WW49 Weekly PM | FABSIX::R_POIRIER | | Wed Jun 05 1996 06:09 | 26 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 6-5-96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: B shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 39/39
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Wiped up excess water in pan
Brush Heights: OB-front = 315 OB-rear = 350
IB-front = 257 IB-rear = 328
|
| 46.2 | Quarterly PM Checksheet Template | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Tue Jun 11 1996 22:50 | 36 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Quarterly Preventative Maintenance Check Sheet, Rev D
DATE:__________ SYSTEM RTC CODE:__________ TECH. NAME:__________________
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:__________
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:__________
6.1.3 Check the Drip Pan for contamination Completed:___________
6.1.4 Check all tubing/fittings for leaks Completed:___________
6.1.5 Check all wafer transport belts Completed:___________
6.1.6 Clean the Send module and Scrub modules Completed:___________
6.1.7 Check scrub brushes for contamination Completed:___________
6.1.8 Check scrub brush height in both modules Completed:___________
6.3.1 Check muffin fans for functionality Completed:___________
6.3.2 Check motor drive belts for defects Completed:___________
6.3.3 Check the robot knife for loose hardware Completed:___________
6.3.4 Check the spin station grippers Completed:___________
6.3.5 Check the motor speed output readings Completed:___________
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
|
| 46.3 | Semi-Annual PM Checksheet Template | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Tue Jun 11 1996 22:51 | 66 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Semi-Annual Preventative Maintenance Check Sheet, Rev D
DATE:__________ SYSTEM RTC CODE:__________ TECH. NAME:__________________
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:__________
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:__________
6.1.3 Check the Drip Pan for contamination Completed:___________
6.1.4 Check all tubing/fittings for leaks Completed:___________
6.1.5 Check all wafer transport belts Completed:___________
6.1.6 Clean the Send module and Scrub modules Completed:___________
6.1.7 Check scrub brushes for contamination Completed:___________
6.1.8 Check scrub brush height in both modules Completed:___________
6.3.1 Check muffin fans for functionality Completed:___________
6.3.2 Check motor drive belts for defects Completed:___________
6.3.3 Check the robot knife for loose hardware Completed:___________
6.3.4 Check the spin station grippers Completed:___________
6.3.5 Check the motor speed output readings Completed:___________
6.4.1 Check all EMO's for functionality Completed:___________
6.4.2 Check all interlocks for functionality Completed:___________
6.4.3 Check heat lamp housing/wiring for defects Completed:___________
6.4.4 Check the robot hardware/wiring for defects Completed:___________
6.4.5 Check the spindle bearings/bushings Completed:___________
6.4.6 Check the spin sta. rollers/bearings/bushings Completed:___________
6.4.7 Check the brush sta. drive bearings/bushings Completed:___________
6.4.8 Check the +5 VDC power supply Pre-Adjust:__________
Post-Adjust:_________
6.4.9 Check the -12 VDC power supply Pre-Adjust:__________
6.4.10 Check the +12 VDC power supply Pre-Adjust:__________
6.4.11 Check the +24 VDC power supply Pre-Adjust:__________
Post-Adjust:_________
6.4.12 Check the +48 VDC power supply Pre-Adjust:__________
Post-Adjust:_________
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
|
| 46.39 | Weekly PM for WW50 completed | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Tue Jun 11 1996 23:33 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 6/11/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: BJ
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Found DI water in drip pan. Source is from manifold
area but unable to trace exact source.
Brush Heights: OB-front = 315 OB-rear = 350
IB-front = 257 IB-rear = 328
|
| 46.40 | WW 51 - Weekly | SUBPAC::LANDRY | | Sun Jun 16 1996 16:52 | 30 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 6/11/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 38/39
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Small amount of DI water found in the drip pan. Cleaned
up and checked for leaks. Unable to locate cause.
Found two drip manifolds not dripping as should. The OB
entrance manifold and the IB exit manifold needed to be
turned up to allow proper drip.
Brush Heights: OB-front = 315 OB-rear = 350
IB-front = 257 IB-rear = 328
|
| 46.41 | WW52 Weekly PM | FABSIX::R_POIRIER | | Mon Jun 24 1996 01:47 | 28 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 6/24/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: B shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 39/39
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Small amount of DI water found in the drip pan. Cleaned
up and checked for leaks.
Brush Heights: OB-front = 315 OB-rear = 350
IB-front = 257 IB-rear = 328
|
| 46.42 | weekly p.m. | FABSIX::R_GEE | | Tue Jul 02 1996 02:04 | 27 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 7/02/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: B shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 39/39
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Small amount of DI water found in the drip pan. Cleaned
up and checked for leaks.
Brush Heights: OB-front = 315 OB-rear = 350
IB-front = 313 IB-rear = 388
|
| 46.43 | SCRUB.A1 SHUT-DOWN COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jul 04 1996 02:30 | 24 |
|
CMP-SCRUB.A1 SHUTDOWN CHECKSHEET
--------------------------------
Tech Date
------- -------
1. Change RTC status to SCHEDULED DOWN. BJ 7/3/96
2. Close main incoming DI Water valve(s) to each
system and open the DI Water return valve
(UDR). This will allow all incoming DI Water
to flow to UDR. BJ 7/3/96
3. Remove all PVA scrub brushes and submerge BJ 7/3/96
in DI water.
4. Perform a complete wipe down and dry of
all wet surfaces. BJ 7/3/96
5. Power down each system. BJ 7/3/96
6. Enter checksheet into notesfile. BJ 7/3/96
|
| 46.44 | Startup check sheet. | FABSIX::L_SHKOLNIKOV | | Fri Jul 05 1996 22:45 | 24 |
|
CMP-SCRUB.A1 STARTUP CHECKSHEET
--------------------------------
DATE 7/5/96 TECH. NAME: Leon
1. Ensure that all necessary facilities are
available and ready to use. ___X___
2. Power up system. ___X___
3. Re-install PVA scrub brushes. ___X____
4. Open incoming DI Water Valve(s)
system. ___X___
5. Close UDR valve at system. ___X___
6. Change RTC status to VERIFY and notify
Operations that the systems are ready
for MQC. ___X___
|
| 46.45 | WW 2 / FY97 - Weekly | SUBPAC::LANDRY | | Sun Jul 07 1996 16:12 | 32 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 7/7/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 32/32
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Small amount of DI water found in the drip pan. Could not
locate the source. Checked flow meter fittings for tightness.
Found the brush splash guards lying in the bottom of both the
IB + OB stations. Re-installed
Found the OB Exit + IB Exit drip manifolds shut off. Re-setup
for proper drip.
Brush Heights: OB-front = 315 OB-rear = 350
IB-front = 313 IB-rear = 388
|
| 46.46 | ww03 weekly pm | FABSIX::R_POIRIER | | Wed Jul 17 1996 04:20 | 26 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 7/17/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: B Shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 38/38
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Small amount of DI water found in the drip pan.
Brush Heights: OB-front = 315 OB-rear = 350
IB-front = 313 IB-rear = 388
|
| 46.47 | ww04 weekly pm | FABSIX::L_SHKOLNIKOV | | Fri Jul 26 1996 05:45 | 27 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 7/26/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: D shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40/40
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Small amount of DI water found in the drip pan. Could not
locate the source. Checked fittings for tightness.
Will take a close look when manufacturing give us the time.
OB IB
Brush Heights: rear 350 388
front 315 313
|
| 46.48 | WW V - Weekly variety | SUBPAC::LANDRY | | Mon Jul 29 1996 12:56 | 27 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 7/29/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 37 / 37
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Found a puddle in the drip pan. Traced the source to the OB
station drip regulator, where the fitting needed to be re-taped.
OB IB
Brush Heights: rear 350 388
front 315 313
|
| 46.49 | QUARTERLY PM FOR WW6 COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Aug 07 1996 22:42 | 34 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Quarterly Preventative Maintenance Check Sheet, Rev D
DATE: 8/7/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH/SHIFT: D
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 37/35
6.1.3 Check the Drip Pan for contamination Completed:____X______
6.1.4 Check all tubing/fittings for leaks Completed:____X______
6.1.5 Check all wafer transport belts Completed:____X______
6.1.6 Clean the Send module and Scrub modules Completed:____X______
6.1.7 Check scrub brushes for contamination Completed:____X______
6.1.8 Check scrub brush height in both modules Completed:____X______
6.3.1 Check muffin fans for functionality Completed:____X______
6.3.2 Check motor drive belts for defects Completed:____X______
6.3.3 Check the robot knife for loose hardware Completed:____X______
6.3.4 Check the spin station grippers Completed:____X______
6.3.5 Check the motor speed output readings Completed:____X______
Comments:
|
| 46.50 | WW VII - Weekly version | SUBPAC::LANDRY | | Sun Aug 11 1996 17:10 | 29 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 8/11/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 38 / 37
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Found a small puddle in the drip pan.
Adjusted the IB spray manifold's drip flow. It was way to
high, flowing freely.
OB IB
Brush Heights: rear 350 388
front 315 313
|
| 46.51 | WW8 Weekly PM | FABSIX::R_POIRIER | | Mon Aug 19 1996 23:04 | 28 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 8/19/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: B shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 38 / 37
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Found a small puddle in the drip pan.
OB IB
Brush Heights: rear 350 388
front 315 313
|
| 46.52 | WW IX - Weekly version | SUBPAC::LANDRY | | Sun Aug 25 1996 13:28 | 25 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 8/25/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 52
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 38 / 38
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Brush Heights: Front 315 313
Rear 350 388
|
| 46.53 | WW X - Weekly version | SUBPAC::LANDRY | | Sun Sep 01 1996 13:41 | 28 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9/1/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 38 / 38
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Found fluid in the drip pan. Wiped up. Could not locate
the source of the fluid. Re-tightened fluid manifold
fittings.
OB IB
Brush Heights: Front 315 313
Rear 350 388
|
| 46.54 | CMP-SCRUB.A1 SHUTDOWN CHECKSHEET | FABSIX::R_POIRIER | | Mon Sep 02 1996 01:55 | 20 |
|
CMP-SCRUB.A1/.A1/.A3/.C1-7 SHUTDOWN CHECKSHEET
----------------------------------------------
Tech. Date
------- -------
1. Close main incoming DI Water valve to each
system and open the DI Water return valve
(UDR). This will allow all incoming DI Water
to flow to UDR. ___B___ _9/1/96_
2. Remove all PVA scrub brushes and submerge
in DI water. Label each brush with the
tool name. ___B___ _9/1/96_
3. Perform a complete wipe down and dry of
all wet surfaces. ___B___ _9/1/96_
4. Power down each system. ___B___ _9/1/96_
5. Enter checksheet into notesfile. ___B___ _9/1/96_
|
| 46.55 | start up | FABSIX::B_FINN | | Tue Sep 03 1996 19:16 | 24 |
|
CMP-SCRUB.A1 STARTUP CHECKSHEET
--------------------------------
DATE 9/3/96 TECH. NAME: A shift
1. Ensure that all necessary facilities are
available and ready to use. ___X___
2. Power up system. ___X___
3. Re-install PVA scrub brushes. ___X____
4. Open incoming DI Water Valve(s)
system. ___X___
5. Close UDR valve at system. ___X___
6. Change RTC status to VERIFY and notify
Operations that the systems are ready
for MQC. ___X___
|
| 46.56 | WW XI - Weekly | SUBPAC::LANDRY | | Sun Sep 08 1996 17:18 | 27 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9/8/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 37 / 36
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Found excessive drip (actually a small flow) in the IB exit
spray manifold. Re-setup for proper drip.
OB IB
Brush Heights: Front 315 313
Rear 350 388
|
| 46.57 | WW XII - Weekly | SUBPAC::LANDRY | | Sun Sep 15 1996 17:50 | 33 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9/15/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 38 / 37
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Found a small puddle of DI water in the catch pan. The source
was identified as the teflon valve for the IB entrance rinse.
The fittings were tightened. No leaks have re-appeared at this
time.
Also rebuilt the rollers for the wafer transport belt in the OB
station. The bearings were replaced and the rod + roller were
cleaned up.
OB IB
Brush Heights: Front 315 313
Rear 350 388
|
| 46.58 | WW13 Weekly PM | FABSIX::R_POIRIER | | Sun Sep 22 1996 06:06 | 29 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9/22/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: B shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 39 / 39
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Found and wiped up a small puddle in the catch pan.
Not sure of source.
OB IB
Brush Heights: Front 315 348
Rear 350 388
|
| 46.59 | WEEKLY PM FOR WW14 COMPLETED | FABSIX::B_JUBINVILLE | | Fri Oct 04 1996 05:14 | 30 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/4/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: D shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 38 / 38
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: IB-F height was found at 347, not note as to why it was
changed so it was moved backed to 313 and the height was
checked which was still ok.
OB IB
Brush Heights: Front 315 313
Rear 350 388
|
| 46.60 | WW XV - Weekly completed | SUBPAC::LANDRY | | Wed Oct 09 1996 10:59 | 27 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/9/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 38
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Brush Heights: Front 315 313
Rear 350 388
|
| 46.61 | WW 16 weekly p.m. completed | FABSIX::R_GEE | | Mon Oct 14 1996 17:03 | 30 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/14/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 38
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Brush Heights: Front 315 313
Rear 350 388
----------------------------------
IB station bottom brush wasn't rotating properly, replaced the
bearings and slightly repositioned the motor for smooth rotation.
|
| 46.62 | WW XVII - Weekly completed | SUBPAC::LANDRY | | Sun Oct 20 1996 17:17 | 28 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/20/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Gee / Landry
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 39
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Brush Heights: Front 315 313
Rear 350 387
----------------------------------
|
| 46.63 | weekly pm 10/27/96 ww18 | STRATA::RIDLON | Eliminate the oblivious | Sun Oct 27 1996 01:41 | 31 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/27/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Ridlon
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 39
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Brush Heights: Front 270 345
Rear 310 345
BRUSHES CHANGED ON 10/21 HENCE THE DIFFERENCE IN BRUSH
HEIGHTS FROM LAST WEEKS WEEKLY PM.
----------------------------------
|
| 46.64 | ww19 Semi Annual PM | ASDG::POIRIER | | Fri Nov 08 1996 18:34 | 109 |
| -< SEMI-ANNUAL PM CHECKSHEET >-
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Semi-Annual Preventative Maintenance Check Sheet, Rev D
DATE: 10/7/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH NAME/S: Brad Westphal
John Poirier
6.1 Perform Weekly PM Completed:___X_______
6.3 Perform Quarterly PM Completed:___X_______
6.4.1 Check all EMO's for functionality Completed:___X_______
6.4.2 Check all interlocks for functionality Completed:___X_______
6.4.3 Check heat lamp housing/wiring for defects Completed:___X_______
6.4.4 Check the robot hardware/wiring for defects Completed:___X_______
6.4.5 Check the spindle bearings/bushings Completed:___X_______
6.4.6 Check the spin sta. rollers/bearings/bushings Completed:___X_______
6.4.7 Check the brush sta. drive bearings/bushings Completed:___X_______
6.4.8 Check the +5 VDC power supply Pre-Adjust:__5v______
Post-Adjust:_N/A_____
6.4.9 Check the -12 VDC power supply Pre-Adjust:__12v_____
6.4.10 Check the +12 VDC power supply Pre-Adjust:__N/A_____
6.4.11 Check the +24 VDC power supply Pre-Adjust:__23.99v__
Post-Adjust:_N/A_____
6.4.12 Check the +48 VDC power supply Pre-Adjust:__48.1v___
Post-Adjust:_N/A_____
COMMENTS:
Note: N/A = No adjustment necessary.
--------------------------------------------------------------------------------
-< QUARTERLY PM CHECKSHEET >-
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Quarterly Preventative Maintenance Check Sheet, Rev D
DATE: 10/7/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH NANE/S: Brad Westphal
John Poirier
6.1 Perform Weekly PM Completed:____X______
6.3.1 Check muffin fans for functionality Completed:____X______
6.3.2 Check motor drive belts for defects Completed:____X______
6.3.3 Check the robot knife for loose hardware Completed:____X______
6.3.4 Check the spin station grippers Completed:____X______
6.3.5 Check the motor speed output readings Completed:____X______
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
--------------------------------------------------------------------------------
-< WEEKLY PM CHECKSHEET >--
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/7/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH NAME/S: Brad Westphal
John Poirier
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:___50_____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:___40_____
6.1.3 Check the Drip Pan for contamination Completed:____X______*
6.1.4 Check all tubing/fittings for leaks Completed:____X______
6.1.5 Check all wafer transport belts Completed:____X______
6.1.6 Clean the Send module and Scrub modules Completed:____X______
6.1.7 Check scrub brushes for contamination Completed:____X______
6.1.8 Check scrub brush height in both modules Completed:____X______
Comments: Found small D.I. water leak around Outside Brush Station Roller
Arm Shaft(Front). The water had leaked onto the support plate under
the Outside Brush Station and into Drip Pan. Sealed bottom of tank
with RTV.
__________________________________________________________________
|
| 46.65 | WEEKLY PM FOR WW20 COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Tue Nov 12 1996 21:20 | 31 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/12/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Jubinville (BJ)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BJ
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 37/37 BJ
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: BJ
Comments:
OB IB
Brush Heights: Front 270 345
Rear 310 345
BRUSHES CHANGED ON 10/21 HENCE THE DIFFERENCE IN BRUSH
HEIGHTS FROM LAST WEEKS WEEKLY PM.
----------------------------------
|
| 46.66 | WW 21 weekly p.m. completed | FABSIX::R_GEE | | Mon Nov 18 1996 18:51 | 28 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/18/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: BG
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 38/38
6.1.3 Check the Drip Pan for contamination Completed: BG
6.1.4 Check all tubing/fittings for leaks Completed: BG
6.1.5 Check all wafer transport belts Completed: BG
6.1.6 Clean the Send module and Scrub modules Completed: BG
6.1.7 Check scrub brushes for contamination Completed: BG
6.1.8 Check scrub brush height in both modules Completed: BG
Comments:
OB IB
Brush Heights: Front 270 345
Rear 310 345
|
| 46.67 | ww22 pm completed | FABSIX::B_FINN | | Sun Nov 24 1996 13:49 | 28 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/24/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME:Landry,Finn
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 39/39
6.1.3 Check the Drip Pan for contamination Completed: TL/BF
6.1.4 Check all tubing/fittings for leaks Completed: TL/BF
6.1.5 Check all wafer transport belts Completed: TL/BF
6.1.6 Clean the Send module and Scrub modules Completed: TL/BF
6.1.7 Check scrub brushes for contamination Completed: TL/BF
6.1.8 Check scrub brush height in both modules Completed: TL/BF
Comments:
OB IB
Brush Heights: Front 270 345
Rear 310 345
|
| 46.68 | WW 23 - Weekly completed | SUBPAC::LANDRY | | Sun Dec 01 1996 18:34 | 28 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/1/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Landry/Finn/Gee
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 39/38
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Brush Heights: Front 270 345
Rear 310 345
|
| 46.69 | WW 24 - Weekly completed | SUBPAC::LANDRY | | Sun Dec 08 1996 13:40 | 28 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/8/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Landry / Gee
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 39/38
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Brush Heights: Front 270 345
Rear 310 345
|
| 46.70 | WW XXV - Weekly completed | SUBPAC::LANDRY | | Sun Dec 15 1996 14:43 | 31 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/15/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Landry / Gee
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 38/37
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Found water on back side of the send station. Water is dripping
from the send station where the cover and tank meet.
OB IB
---- ----
Brush Heights: Front 270 345
Rear 310 345
|
| 46.71 | weekly ww26 | FABSIX::M_RIDLON | Eliminate the oblivious | Mon Dec 23 1996 02:05 | 30 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/23/96 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Ridlon
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 38/37
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
OB IB
---- ----
Brush Heights: Front 270 345
Rear 310 345
Comments: Found water on back side of the send station. Water is dripping
from the send station where the cover and tank meet.
|
| 46.72 | cmp-scrub.a1 shutdown checksheet completed | FABSIX::R_GEE | | Tue Dec 31 1996 15:56 | 23 |
|
CMP-SCRUB.A1/.A2/.A3/.C1-7 SHUTDOWN CHECKSHEET Tech: Tim Landry
---------------------------------------------- Bob Gee
Tech. Date
------- -------
1. Close main incoming DI Water valve(s) to each
system and open the DI Water return valve
(UDR). This will allow all incoming DI Water
to flow to UDR. Tim Landry 12/31/96
2. Remove all PVA scrub brushes and submerge Bob Gee 12/31/96
in a mixture of DI water and H2O2. Label
each brush with the tool name and brush box
location.
3. Perform a complete wipe down and dry of
all wet surfaces. Tim Landry 12/31/96
4. Power down each system. Tim Landry 12/31/96
5. Enter checksheet into notesfile. Bob Gee 12/31/96
|
| 46.73 | WEEKLY PM COMPLETED FOR WW27 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jan 02 1997 07:39 | 29 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/2/97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Olin Whitford (OW)
Brian Jubinville (BJ)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50/OW
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40/38/BJ
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: OW
OB IB
---- ----
Brush Heights: Front 270 345
Rear 310 345
Comments:
|
| 46.74 | WEEKLY PM COMPLETED FOR WW28 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Jan 08 1997 06:06 | 29 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/8/97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Olin Whitford (OW)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 OW
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 38 OW
6.1.3 Check the Drip Pan for contamination Completed: OW
6.1.4 Check all tubing/fittings for leaks Completed: OW
6.1.5 Check all wafer transport belts Completed: OW
6.1.6 Clean the Send module and Scrub modules Completed: OW
6.1.7 Check scrub brushes for contamination Completed: OW
6.1.8 Check scrub brush height in both modules Completed: OW
OB IB
---- ----
Brush Heights: Front 270 345
Rear 310 345
Comments: 6.1.2 - Engineer notified..
|
| 46.75 | WW29 Weekly PM | FABSIX::R_POIRIER | | Mon Jan 13 1997 04:40 | 31 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 01/13/97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAMES: ROGER POIRIER
MITCH RIDLON
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 RP
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 35 RP
6.1.3 Check the Drip Pan for contamination Completed: MR/RP
6.1.4 Check all tubing/fittings for leaks Completed: MR/RP
6.1.5 Check all wafer transport belts Completed: RP
6.1.6 Clean the Send module and Scrub modules Completed: RP
6.1.7 Check scrub brushes for contamination Completed: RP
6.1.8 Check scrub brush height in both modules Completed: RP
OB IB
---- ----
Brush Heights: Front 270 345
Rear 310 345
Comments: * 6.1.2 - Engineer notified..
|
| 46.76 | WW30 Weekly PM Completed | FABSIX::R_POIRIER | | Sun Jan 19 1997 22:34 | 31 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 01/19/97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAMES: ROGER POIRIER (RP)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 RP
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 35 RP *
6.1.3 Check the Drip Pan for contamination Completed: RP
6.1.4 Check all tubing/fittings for leaks Completed: RP
6.1.5 Check all wafer transport belts Completed: RP
6.1.6 Clean the Send module and Scrub modules Completed: RP
6.1.7 Check scrub brushes for contamination Completed: RP
6.1.8 Check scrub brush height in both modules Completed: RP
OB IB
---- ----
Brush Heights: Front 270 345
Rear 310 345
Comments: * 6.1.2 - Low D.I. Water pressure
E.E. notified..
|
| 46.77 | WW31 Weekly PM | FABSIX::R_POIRIER | | Mon Jan 27 1997 21:59 | 31 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 01/27/97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAMES: ROGER POIRIER (RP)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 RP
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 35 RP *
6.1.3 Check the Drip Pan for contamination Completed: RP
6.1.4 Check all tubing/fittings for leaks Completed: RP
6.1.5 Check all wafer transport belts Completed: RP
6.1.6 Clean the Send module and Scrub modules Completed: RP
6.1.7 Check scrub brushes for contamination Completed: RP
6.1.8 Check scrub brush height in both modules Completed: RP
OB IB
---- ----
Brush Heights: Front 270 345
Rear 310 345
Comments: * 6.1.2 - Low D.I. Water pressure
E.E. notified..
|
| 46.78 | QUARTERLY PM COMPLETED FOR WW32 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Feb 05 1997 08:36 | 48 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Quarterly Preventative Maintenance Check Sheet, Rev D
DATE: 02.05.97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH NAME: Leon Shkolnikov - LS
6.1 Perform Weekly PM Completed: ls
6.3.1 Check muffin fans for functionality Completed: ls
6.3.2 Check motor drive belts for defects Completed: ls
6.3.3 Check the robot knife for loose hardware Completed: ls
6.3.4 Check the spin station grippers Completed: ls
6.3.5 Check the motor speed output readings Completed: ls
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 psi LS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 37 psi* LS
6.1.3 Check the Drip Pan for contamination Completed: ls
6.1.4 Check all tubing/fittings for leaks Completed: ls
6.1.5 Check all wafer transport belts Completed: ls
6.1.6 Clean the Send module and Scrub modules Completed: ls
6.1.7 Check scrub brushes for contamination Completed: ls
6.1.8 Check scrub brush height in both modules Completed: ls
Comments: Brush heights
OB IB
Rear 310 345
Front 270 345
* 6.1.2 Low DI water pressure - EE notified.
|
| 46.79 | WW #33 Weekly PM | FABSIX::O_WHITFORD | Lead, follow or step aside. | Thu Feb 13 1997 05:57 | 34 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 2/13/97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Dave Whitford
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 DW
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 38* DW
6.1.3 Check the Drip Pan for contamination Completed: DW
6.1.4 Check all tubing/fittings for leaks Completed: DW
6.1.5 Check all wafer transport belts Completed: DW
6.1.6 Clean the Send module and Scrub modules Completed: DW
6.1.7 Check scrub brushes for contamination Completed: DW
6.1.8 Check scrub brush height in both modules Completed: DW
Comments: Brush heights
Outer station
Inside = .270
Outside= .310
Inner station
Inside = .345
Outside= .345
* Equipment engineering has been notified that DI Water pressure cannot
be adjusted up to the specified 40 PSI.
|
| 46.80 | WW 34 - Weekly completed | SUBPAC::LANDRY | | Tue Feb 18 1997 13:52 | 35 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 2/18/97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Brendan Finn (BF)
Tim Landry (TL)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BF
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 37/37 BF
6.1.3 Check the Drip Pan for contamination Completed: TL
6.1.4 Check all tubing/fittings for leaks Completed: BF
6.1.5 Check all wafer transport belts Completed: BF
6.1.6 Clean the Send module and Scrub modules Completed: TL
6.1.7 Check scrub brushes for contamination Completed: TL
6.1.8 Check scrub brush height in both modules Completed: BF
Comments: Brush heights
Outer station
Inside = 270
Outside= 310
Inner station
Inside = 345
Outside= 345
* Equipment engineering has been notified that DI Water pressure cannot
be adjusted up to the specified 40 PSI.
|
| 46.81 | WW 35 - Weekly completed | FABSIX::J_SADIN | Freedom isn't free. | Tue Feb 25 1997 13:20 | 38 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 2/25/97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Jim Sadin (JS)
Brendan Finn (BF)
Bob Gee (BG)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 JS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 37/37 JS
6.1.3 Check the Drip Pan for contamination Completed: BG
6.1.4 Check all tubing/fittings for leaks Completed: BF
6.1.5 Check all wafer transport belts Completed: JS
6.1.6 Clean the Send module and Scrub modules Completed: JS/BG
6.1.7 Check scrub brushes for contamination Completed: BF
6.1.8 Check scrub brush height in both modules Completed: JS
Comments: Brush heights
Outer station
Inside = 270
Outside= 310
Inner station
Inside = 345
Outside= 345
* Equipment engineering has been notified that DI Water pressure cannot
be adjusted up to the specified 40 PSI.
* Replaced burnt out door latch bulb.
|
| 46.82 | ww36 weekly pm. | FABSIX::L_SHKOLNIKOV | No more experiments with freedom | Wed Mar 05 1997 01:37 | 31 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:03/05/97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH: Leon shkolnikov (LS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 38 psi
6.1.3 Check the Drip Pan for contamination Completed: LS
6.1.4 Check all tubing/fittings for leaks Completed: LS
6.1.5 Check all wafer transport belts Completed: LS
6.1.6 Clean the Send module and Scrub modules Completed: LS
6.1.7 Check scrub brushes for contamination Completed: LS
6.1.8 Check scrub brush height in both modules Completed: LS
OB IB
---- ----
Brush Heights: Front 310 345
Rear 270 345
Comments: *EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
|
| 46.83 | WEEKLY PM FOR WW37 COMPLETED | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Mar 13 1997 21:27 | 31 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:03/13/97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH: Brian Jubinville (BJ)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BJ
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 38 BJ
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: BJ
OB IB
---- ----
Brush Heights: Front 310 345
Rear 270 345
Comments: 6.1.2 * EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
|
| 46.84 | WW38 weekly pm completed. | FABSIX::J_SADIN | Freedom isn't free. | Sun Mar 16 1997 13:17 | 32 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:03/16/97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH: Timothy Landry (TL)
James Sadin (JS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 JS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 38 JS
6.1.3 Check the Drip Pan for contamination Completed: TL
6.1.4 Check all tubing/fittings for leaks Completed: TL
6.1.5 Check all wafer transport belts Completed: JS
6.1.6 Clean the Send module and Scrub modules Completed: TL/JS
6.1.7 Check scrub brushes for contamination Completed: TL
6.1.8 Check scrub brush height in both modules Completed: JS
OB IB
---- ----
Brush Heights: Front 270 345
Rear 310 345
Comments: 6.1.2 * EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
|
| 46.85 | WW39 weekly pm completed. | FABSIX::J_SADIN | Freedom isn't free. | Tue Mar 25 1997 12:55 | 32 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:03/25/97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH: Timothy Landry (TL)
James Sadin (JS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 JS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 37 JS
6.1.3 Check the Drip Pan for contamination Completed: TL
6.1.4 Check all tubing/fittings for leaks Completed: TL
6.1.5 Check all wafer transport belts Completed: JS
6.1.6 Clean the Send module and Scrub modules Completed: TL/JS
6.1.7 Check scrub brushes for contamination Completed: TL
6.1.8 Check scrub brush height in both modules Completed: JS
OB IB
---- ----
Brush Heights: Front 339 345
Rear 350 345
Comments: 6.1.2 * EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
|
| 46.86 | ww40 weekly pm completed. | FABSIX::J_SADIN | Freedom isn't free. | Mon Mar 31 1997 09:58 | 35 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:03/31/97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH: Timothy Landry (TL)
James Sadin (JS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 JS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 37 JS
6.1.3 Check the Drip Pan for contamination Completed: TL
6.1.4 Check all tubing/fittings for leaks Completed: TL
6.1.5 Check all wafer transport belts Completed: JS
6.1.6 Clean the Send module and Scrub modules Completed: TL/JS
6.1.7 Check scrub brushes for contamination Completed: TL
6.1.8 Check scrub brush height in both modules Completed: JS
OB IB
---- ----
Brush Heights: Front 349 345
Rear 349 345
Comments: 6.1.2 * EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
found small puddle of water under machine. could not determine
source. cleaned up water.
|
| 46.87 | WW41 weekly pm completed | FABSIX::J_SADIN | Freedom isn't free. | Wed Apr 09 1997 09:54 | 36 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:04/09/97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH: Timothy Landry (TL)
James Sadin (JS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 JS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 37 JS
6.1.3 Check the Drip Pan for contamination Completed: TL
6.1.4 Check all tubing/fittings for leaks Completed: TL
6.1.5 Check all wafer transport belts Completed: JS
6.1.6 Clean the Send module and Scrub modules Completed: TL/JS
6.1.7 Check scrub brushes for contamination Completed: TL
6.1.8 Check scrub brush height in both modules Completed: JS
OB IB
---- ----
Brush Heights: Front 350 345
Rear 350 345
Comments: 6.1.2 * EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
found small puddle of water under machine. could not determine
source. cleaned up water.
|
| 46.88 | WEEKLY PM FOR WW42 COMPLETED | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri Apr 18 1997 06:03 | 34 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:04/18/97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH: Brian Jubinville (BJ)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BJ
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 37 BJ
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: BJ
OB IB
---- ----
Brush Heights: Front 350 345
Rear 350 345
Comments: 6.1.2 * EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
|
| 46.89 | WW 43 weekly PM complete | FABSIX::O_WHITFORD | Lead, follow or step aside. | Wed Apr 23 1997 13:52 | 31 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 4/23/97 SYSTEM RTC CODE:CMP-SCRUB.A1 TECH NAME: Dave Whitford (DW)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 38*
6.1.3 Check the Drip Pan for contamination Completed: DW
6.1.4 Check all tubing/fittings for leaks Completed: DW
6.1.5 Check all wafer transport belts Completed: DW
6.1.6 Clean the Send module and Scrub modules Completed: DW
6.1.7 Check scrub brushes for contamination Completed: DW
6.1.8 Check scrub brush height in both modules Completed: DW
Outer Brush station Front .373
Rear .349
Inner Brust Station Front .345
Rear .345
Comments: *Notified EE if 2 psi variation in DI water pressure
|
| 46.90 | WEEKLY PM COMPLETED FOR WW44 | FABSIX::B_JUBINVILLE | | Wed Apr 30 1997 00:05 | 32 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 4/29/97 SYSTEM RTC CODE:CMP-SCRUB.A1 TECH NAME: Brian Jubinville (BJ)
Dave Morin (DM)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BJ/DM
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 38* BJ/DM
6.1.3 Check the Drip Pan for contamination Completed: BJ/DM
6.1.4 Check all tubing/fittings for leaks Completed: BJ/DM
6.1.5 Check all wafer transport belts Completed: BJ/DM
6.1.6 Clean the Send module and Scrub modules Completed: BJ/DM
6.1.7 Check scrub brushes for contamination Completed: BJ/DM
6.1.8 Check scrub brush height in both modules Completed: BJ/DM
Outer Brush station Front .350
Rear .350
Inner Brush Station Front .345
Rear .345
Comments: 6.1.2 DI out of spec. E.E. notified
|
| 46.90 | WW44 weekly pm completed | FABSIX::B_JUBINVILLE | | Wed Apr 30 1997 05:29 | 32 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 4/29/97 SYSTEM RTC CODE:CMP-SCRUB.A1 TECH NAME: Brian Jubinville (BJ)
Dave Morin (DM)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BJ/DM
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 38 BJ/DM *
6.1.3 Check the Drip Pan for contamination Completed: BJ/DM
6.1.4 Check all tubing/fittings for leaks Completed: BJ/DM
6.1.5 Check all wafer transport belts Completed: BJ/DM
6.1.6 Clean the Send module and Scrub modules Completed: BJ/DM
6.1.7 Check scrub brushes for contamination Completed: BJ/DM
6.1.8 Check scrub brush height in both modules Completed: BJ/DM
Outer Brush station Front .350
Rear .350
Inner Brush Station Front .345
Rear .345
Comments: 6.1.2 DI out of spec. E.E. notified
|
| 46.91 | WW45 SEMI-ANNUAL COMPLETED | FABSIX::R_POIRIER | | Sat May 10 1997 23:45 | 100 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:5/10/97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: JOHN POIRIER (JP)
MIKE STANDING (MS)
ROGER POIRIER (RP)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:50PSI_JP____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:38PSI JP *
6.1.3 Check the Drip Pan for contamination Completed:DRY_JP_____
6.1.4 Check all tubing/fittings for leaks Completed:DRY_JP_____
6.1.5 Check all wafer transport belts Completed:___RP______
6.1.6 Clean the Send module and Scrub modules Completed:DONE__JP___
6.1.7 Check scrub brushes for contamination Completed:CLEAN_JP___
6.1.8 Check scrub brush height in both modules Completed:__RP_________
Comments:____OUTSIDE FRONT 350 OUTSIDE REAR 350
INSIDE FRONT 345 INSIDE REAR 345
* 6.1.2 DI WATER PRESSURE AT 40 PSI
WATER PRESSURE AT 38 PSI E.E. NOTIFIED.
--------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Quarterly Preventative Maintenance Check Sheet, Rev D
DATE:5-10-97 SYSTEM RTC CODE:CMP-SCRUB.A1 TECH. NAME: Roger Poirier (RP)
Brad Westphal (BW)
John Poirier (JP)
6.1 Perform Weekly PM Completed:___RP______
6.3.1 Check muffin fans for functionality Completed:GOOD JP____
6.3.2 Check motor drive belts for defects Completed:__BW_______
6.3.3 Check the robot knife for loose hardware Completed:GOOD JP____
6.3.4 Check the spin station grippers Completed:GOOD JP____
6.3.5 Check the motor speed output readings Completed:___RP______
Comments:__ROBOT ROTATION BELT WAS REPLACED AND MOTOR POSITION ADJUSTED.___
E.E. NOTIFIED
-------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Semi-Annual Preventative Maintenance Check Sheet, Rev D
DATE:_5-10-97 SYSTEM RTC CODE:CMP-SCRUB.A1 TECH. NAME:Roger Poirier (RP)
Mike Standing (MS)
6.1 Perform Weekly PM Completed:___RP______
6.3 Perform Quarterly PM Completed:___RP______
6.4.1 Check all EMO's for functionality Completed:GOOD MS____
6.4.2 Check all interlocks for functionality Completed:GOOD MS____
6.4.3 Check heat lamp housing/wiring for defects Completed:GOOD MS____
6.4.4 Check the robot hardware/wiring for defects Completed:___RP______
6.4.5 Check the spindle bearings/bushings Completed:___RP____
6.4.6 Check the spin sta. rollers/bearings/bushings Completed:___RP______
6.4.7 Check the brush sta. drive bearings/bushings Completed:___RP______
6.4.8 Check the +5 VDC power supply Pre-Adjust:+5.00V RP
Post-Adjust: +5.00V RP
6.4.9 Check the -12 VDC power supply Pre-Adjust:-12.01V RP
6.4.10 Check the +12 VDC power supply Pre-Adjust:+12.01V RP
6.4.11 Check the +24 VDC power supply Pre-Adjust:+24.OV RP
Post-Adjust:+24.0V RP
6.4.12 Check the +48 VDC power supply Pre-Adjust:+48.01V RP
Post-Adjust:+48.01V RP
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
|
| 46.92 | WW 46 - Weekly completed | SUBPAC::LANDRY | | Sun May 11 1997 19:05 | 28 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:5/11/97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Jim Sadin (JS)
Tim Landry (TL)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 PSI JS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:37/37 PSI JS
6.1.3 Check the Drip Pan for contamination Completed: TL
6.1.4 Check all tubing/fittings for leaks Completed: TL
6.1.5 Check all wafer transport belts Completed: JS
6.1.6 Clean the Send module and Scrub modules Completed: JS/TL
6.1.7 Check scrub brushes for contamination Completed: JS/TL
6.1.8 Check scrub brush height in both modules Completed: JS/TL
Comments:____OUTSIDE FRONT 350 OUTSIDE REAR 350
INSIDE FRONT 345 INSIDE REAR 345
* 6.1.2 DI WATER PRESSURE AT 40 PSI
WATER PRESSURE AT 38 PSI E.E. NOTIFIED.
|
| 46.93 | WW47 Weekly PM completed | FABSIX::R_POIRIER | | Tue May 20 1997 04:46 | 32 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:5/20/97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Roger Poirier (RP)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 PSI RP
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:37/37 PSI RP*
6.1.3 Check the Drip Pan for contamination Completed: RP *
6.1.4 Check all tubing/fittings for leaks Completed: RP
6.1.5 Check all wafer transport belts Completed: RP
6.1.6 Clean the Send module and Scrub modules Completed: RP
6.1.7 Check scrub brushes for contamination Completed: RP
6.1.8 Check scrub brush height in both modules Completed: RP
Comments:____OUTSIDE FRONT 350 OUTSIDE REAR 350
INSIDE FRONT 345 INSIDE REAR 345
* 6.1.2 DI WATER PRESSURE AT 40 PSI
Water pressure at 37 PSI E.E. Notified.
* 6.1.3 Found small puddle in drip pan. Traced back to Outside
Brush Lower feed. Put new teflon tape on threads.
E.E. Notified.
|
| 46.94 | CMP-SCRUB.A1 SHUTDOWN AND STARTUP CHECKSHEETS | FABSIX::J_SADIN | Freedom isn't free. | Tue May 27 1997 10:10 | 57 |
|
Scrub.A1
CMP-SCRUB.A1/.A2/.A3/.C1 SHUTDOWN CHECKSHEET FOR 5/26/97
--------------------------------------------------------
Tech. Date
------- -------
1. Change Workstream tool status to NON_SCHEDULED
DOWN. If Workstream will not let the tools go
to NON-SCHEDULED, leave the tools at UP IDLE.
DO NO put any tools to SCHEDULED or UNSCHEDULED RP 5-26-97
DOWN. _______ _______
2. Close main incoming DI Water valve(s) to each
system and open the DI Water return valve
(UDR). This will allow all incoming DI Water RP 5-26-97
to flow to UDR. _______ _______
3. Remove all PVA scrub brushes and submerge
in a mixture of DI water and H2O2. Label
each brush with the tool name and brush box RP 5-26-97
location. _______ _______
4. Perform a complete wipe down and dry of RP 5-26-97
all wet surfaces. _______ _______
RP 5-26-97
5. Power down each system. _______ _______
6. Enter checksheet into notesfile.
CMP-SCRUB.A1/.A2/.A3/.C1-7 STARTUP CHECKSHEET FOR 5/27/97
---------------------------------------------------------
Tech. Date
------- -------
1. Ensure that all necessary facilities are tl 5/27
available and ready to use. _______ _______
tl 5/27
2. Power up each system. _______ _______
tl 5/27
3. Re-install PVA scrub brushes. _______ _______
4. Open incoming DI Water Valve(s) to each tl 5/27
system. _______ _______
tl 5/27
5. Close UDR valve at each system. _______ _______
6. Cycle a minimum of 25 wafers through each tl 5/27
tool to verify proper operation. _______ _______
7. Notify Operations that the systems are ready tl 5/27
for MQC. _______ _______
8. Enter checksheet into notesfile. tl 5/27
|
| 46.95 | WW 48 - Weekly completed | SUBPAC::LANDRY | | Tue May 27 1997 14:47 | 28 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:5/25/97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Tim Landry (TL)
Brendan Finn (BF)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 PSI
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:37/37 PSI
6.1.3 Check the Drip Pan for contamination Completed: TL
6.1.4 Check all tubing/fittings for leaks Completed: BF
6.1.5 Check all wafer transport belts Completed: TL
6.1.6 Clean the Send module and Scrub modules Completed: BF
6.1.7 Check scrub brushes for contamination Completed: BF/TL
6.1.8 Check scrub brush height in both modules Completed: BF
Comments:____OUTSIDE FRONT 350 OUTSIDE REAR 350
INSIDE FRONT 345 INSIDE REAR 345
* 6.1.2 DI WATER PRESSURE AT 40 PSI
Water pressure at 37 PSI E.E. Notified.
|
| 46.96 | WW 49 - Weekly completed | SUBPAC::LANDRY | | Sun Jun 01 1997 19:18 | 29 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:6/1/97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: Bob Gee (BG)
Brendan Finn (BF)
Tim Landry (TL)
Jim Sadin (JS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 PSI
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:39/39 PSI
6.1.3 Check the Drip Pan for contamination Completed: BF
6.1.4 Check all tubing/fittings for leaks Completed: TL
6.1.5 Check all wafer transport belts Completed: JS
6.1.6 Clean the Send module and Scrub modules Completed: BG
6.1.7 Check scrub brushes for contamination Completed: BF/TL
6.1.8 Check scrub brush height in both modules Completed: BF
Comments:____OUTSIDE FRONT 350 OUTSIDE REAR 350
INSIDE FRONT 345 INSIDE REAR 345
* 6.1.2 DI WATER PRESSURE AT 40 PSI
Water pressure at 39 PSI E.E. Notified.
|