| Title: | CMP |
| Notice: | Welcome to the CMP notesfile |
| Moderator: | FABSIX::B_TOWER LLE |
| Created: | Tue Oct 31 1995 |
| Last Modified: | Fri Jun 06 1997 |
| Last Successful Update: | Fri Jun 06 1997 |
| Number of topics: | 94 |
| Total number of notes: | 6381 |
This is the official CMP notesfile! Anything and everything
pertaining to CMP shall be made to reside here. Typing the command SHOW
MOD at the notes> prompt will show you the current moderators of this
notesfile. Feel free to send us mail with any questions you may have!
jim (moderator and creator of the CMP notesfile)
| T.R | Title | User | Personal Name | Date | Lines |
|---|---|---|---|---|---|
| 1.1 | CMP Notesfile Index | ACURA::NEUMANN | Sun Oct 27 1996 10:19 | 26 | |
ASDG::CMP NOTESFILE INDEX
==============================================================================
TOOL/TOPIC NOTE # TOOL NOTE #
==============================================================================
CMP.A PM TEMPLATES...........4 INCOMPLETE PM's..............30
CMP.A1.......................5 SPEEDFAM F.R.A.C.U.S.........31
CMP.A1 CHECKSHEETS...........6 SPEEDFAM BUG/WISH FORM.......32
CMP.A2.......................7 SPEEDFAM HARDWARE/ENG REQ....33
CMP.A2 CHECKSHEETS...........8 CMP.B WAFER CRASH FORM.......34
STRASBAUGH GENERAL ISSUES...15 CMP-SCRUB.A PM TEMPLATES.....35
CMP.B PM TEMPLATES..........16 CMP-SCRUB.A1.................36
CMP.B1......................17 CMP-SCRUB.A1 CHECKSHEETS.....37
CMP.B1 CHECKSHEETS..........18 CMP-SCRUB.A2.................38
CMP.B2......................19 CMP-SCRUB.A2 CHECKSHEETS.....39
CMP.B2 CHECKSHEETS..........20 CMP-SCRUB.A3.................40
CMP.B3......................21 CMP-SCRUB.A3 CHECKSHEETS.....41
CMP.B3 CHECKSHEETS..........22 CMP-SCRUB.C PM TEMPLATES.....44
GENERAL SPEEDFAM ISSUES.....23 CMP-SCRUB.C1-7...............45
WESTECH GENERAL ISSUES......24 CMP-SCRUB.C1-7 CHECKSHEETS...46
CMP.C PM TEMPLATES..........25 ONTRAK GENERAL ISSUES........54
CMP.C1-7....................26 GENERAL CMP ISSUES...........61
CMP.C2-7 CHECKSHEETS........27 FY97 PM SCHEDULE.............66
CMP.C2-7....................28 CMP-6 CALIBRATION LISTINGS...78
CMP.C2-7 CHECKSHEETS........29
==============================================================================
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| 1.2 | CMP.A2 CRASHED 1 WAFER BROKEN JL1330 | FABSIX::S_AGUILA | Mon Apr 14 1997 07:25 | 23 | |
CMP PEX
LOT # JL1330
QUANTITY: 24 - 1 = 23
OPERATION # 1984 MODIFIED SINGLE PASS CMP - PMD
/DESCR.
POLISHER: CMP.A2
EVAL TOOL: N/A
DATE: 04/14/96 B-SHIFT
PROBLEM: CMP.A2 CRASHED, ONE WAFERS SCRAPPED. WAFER CAME OUT OF RIGH
CARRIER. SEE CRASH REPORT INFO.
DISPOSITION: LOTS STILL POLISHING
CORRECTIVE
ACTION CARRIERS AND PAD WERE CHANGED
| |||||